×

Multi-layer PZT microactuator having a poled but inactive PZT constraining layer

  • US 10,236,022 B2
  • Filed: 08/21/2017
  • Issued: 03/19/2019
  • Est. Priority Date: 03/18/2013
  • Status: Active Grant
First Claim
Patent Images

1. A multi-layer piezoelectric microactuator comprising:

  • a plurality of piezoelectric layers configured to form the multi-layer piezoelectric microactuator, each of the plurality of piezoelectric layers including poled piezoelectric material;

    a plurality of electrodes including at least a first electrode on a first side of a first piezoelectric layer of the plurality of piezoelectric layers, at least a second piezoelectric layer is a substantially inactive piezoelectric layer and is configured to act as a constraining layer to resist expansion or contraction of the first piezoelectric layer and to extend the effective stroke length of the multi-layer piezoelectric microactuator, and a second electrode on a second side of the first piezoelectric layer such that the second electrode is between the first piezoelectric layer and the second piezoelectric layer, the second electrode and the first electrode configured to induce an electric field across the first piezoelectric layer upon application of one or more voltages to one or more of the first piezoelectric layer and the second piezoelectric layer to cause the first piezoelectric layer to expand or contract.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×