Method for manufacturing a semiconductor device
First Claim
1. A method for manufacturing a semiconductor device, the method comprising:
- providing a semiconductor substrate having a first side;
forming a trench in the semiconductor substrate, the trench having a bottom and a sidewall extending from the bottom to the first side of the semiconductor substrate;
forming an insulation structure comprising at least a first insulation layer and a second insulation layer on the sidewall and the bottom of the trench, and a third insulation layer on the second insulation layer;
forming a lower conductive structure in a lower portion of the trench;
removing the second insulation layer in an upper portion of the trench while leaving the second insulation layer at least partially in the lower portion of the trench;
forming an upper conductive structure in the upper portion of the trench; and
removing the third insulation layer in the upper portion of the trench while leaving the third insulation layer at least partially in the lower portion of the trench.
3 Assignments
0 Petitions
Accused Products
Abstract
A method for manufacturing a semiconductor device includes: providing a semiconductor substrate having a first side; forming a trench in the semiconductor substrate, the trench having a bottom and a sidewall extending from the bottom to the first side of the semiconductor substrate; forming an insulation structure including at least a first insulation layer and a second insulation layer on the sidewall and the bottom of the trench; forming a lower conductive structure in the lower portion of the trench; removing the second insulation layer in an upper portion of the trench while leaving the second insulation layer at least partially in a lower portion of the trench; and forming an upper conductive structure in the upper portion of the trench.
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Citations
28 Claims
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1. A method for manufacturing a semiconductor device, the method comprising:
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providing a semiconductor substrate having a first side; forming a trench in the semiconductor substrate, the trench having a bottom and a sidewall extending from the bottom to the first side of the semiconductor substrate; forming an insulation structure comprising at least a first insulation layer and a second insulation layer on the sidewall and the bottom of the trench, and a third insulation layer on the second insulation layer; forming a lower conductive structure in a lower portion of the trench; removing the second insulation layer in an upper portion of the trench while leaving the second insulation layer at least partially in the lower portion of the trench; forming an upper conductive structure in the upper portion of the trench; and removing the third insulation layer in the upper portion of the trench while leaving the third insulation layer at least partially in the lower portion of the trench. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A method for manufacturing a semiconductor device, the method comprising:
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forming a trench in a semiconductor substrate, the trench having a bottom and a sidewall extending from the bottom to a first side of the semiconductor substrate; forming a first insulation layer covering the bottom of the trench and extending from the bottom of the trench along the sidewall of the trench to the first side of the semiconductor substrate; forming a second insulation layer on the first insulation layer and extending along the first insulation layer to an upper end of the second insulation layer being recessed relative to the first side of the semiconductor substrate, the first insulation layer and the second insulation layer comprising different materials, the upper end of the second insulation layer defining an upper end of a lower portion of the trench; forming a lower conductive structure in the lower portion of the trench, each of the first and the second insulation layers being arranged between the lower conductive structure and the semiconductor substrate; and forming an upper conductive structure in an upper portion of the trench above the lower portion, the first insulation layer being arranged between the upper conductive structure and the semiconductor substrate.
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21. A method for manufacturing a semiconductor device;
- the method comprising;
providing a semiconductor substrate having a first side; forming a trench in the semiconductor substrate, the trench having a bottom and a sidewall extending from the bottom to the first side of the semiconductor substrate; forming an insulation structure comprising at least a first insulation layer and a second insulation layer on the sidewall and the bottom of the trench; forming a lower conductive structure in a lower portion of the trench; removing the second insulation layer in an upper portion of the trench while leaving the second insulation layer at least partially in the lower portion of the trench; and forming an upper conductive structure in the upper portion of the trench, wherein the lower conductive structure and the upper conductive structure are formed in a common process to form a common conductive structure extending from the lower portion to the upper portion of the trench, wherein the common conductive structure comprises a step at a transition between the lower portion and the upper portion of the trench.
- the method comprising;
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22. A method for manufacturing a semiconductor device, the method comprising:
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providing a semiconductor substrate having a first side; forming a trench in the semiconductor substrate, the trench having a bottom and a sidewall extending from the bottom to the first side of the semiconductor substrate; forming an insulation structure comprising at least a first insulation layer and a second insulation layer on the sidewall and the bottom of the trench, and a third insulation layer on the second insulation layer; forming a lower conductive structure in a lower portion of the trench; removing the second insulation layer in an upper portion of the trench while leaving the second insulation layer at least partially in the lower portion of the trench; forming an upper conductive structure in the upper portion of the trench; removing the third insulation layer in the upper portion of the trench and partially in the lower portion of the trench so that an upper end of the third insulation layer is recessed relative to an upper end of the second insulation layer; and forming the lower conductive structure in the lower portion of the trench such that the lower conductive structure extends from below the upper end of the third insulation layer to above the upper end of the third insulation layer. - View Dependent Claims (23)
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24. A method for manufacturing a semiconductor device, the method comprising:
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providing a semiconductor substrate having a first side; forming a trench in the semiconductor substrate, the trench having a bottom and a sidewall extending from the bottom to the first side of the semiconductor substrate; forming an insulation structure comprising at least a first insulation layer and a second insulation layer on the sidewall and the bottom of the trench; forming a lower conductive structure in a lower portion of the trench; removing the second insulation layer in an upper portion of the trench while leaving the second insulation layer at least partially in the lower portion of the trench; and forming an upper conductive structure in the upper portion of the trench, wherein forming the insulation structure comprises; oxidising the sidewall and the bottom of the trench to form the first insulation layer, the first insulation layer being formed by a first insulation material; depositing a second insulation material on the first insulation layer to form the second insulation layer, the second insulation material being different to the first insulation material and selectively etchable with respect to the first insulation material; and depositing a third insulation material on the second insulation layer to form a third insulation layer. - View Dependent Claims (25, 26, 27, 28)
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Specification