Electronic device, solid state imaging apparatus, and method of producing electrode for electronic device

• US 10,236,396 B2
• Filed: 04/09/2014
• Issued: 03/19/2019
• Est. Priority Date: 04/10/2013
• Status: Active Grant

• Current Assignee: Sony Corporation (Sony Group Corp.)
• Original Assignee: Sony Corporation (Sony Group Corp.)
• Inventors: Moriwaki, Toshiki, Udaka, Toru
• Primary Examiner(s): Menz, Laura M
• Assistant Examiner(s): Chan, Candice
• Application Number:
  US14/249,054
• Publication Number:
  US 20140306180A1
• Time in Patent Office: 1,805 Days
• CPC Class Codes: H01L 27/14665 Imagers using a photoconductor layer
• CPC Class Codes: H01L 2924/0134 Quaternary Alloys
• CPC Class Codes: H01L 31/0224 Electrodes
• CPC Class Codes: H01L 31/022466 made of transparent conductive layers, e.g. TCO, ITO layers
• CPC Class Codes: H01L 31/022475 composed of indium tin oxide [ITO]
• CPC Class Codes: H01L 31/035209 comprising a quantum structures
• CPC Class Codes: H10K 30/81 Electrodes
• CPC Class Codes: H10K 30/82 Transparent electrodes, e.g. indium tin oxide [ITO] electrodes
• CPC Class Codes: H10K 39/32 Organic image sensors
• CPC Class Codes: Y02E 10/549 Organic PV cells

Abstract

There are provided an electronic device including a first electrode, a second electrode and a photoelectric conversion layer sandwiched between the first electrode and the second electrode, the first electrode including an amorphous oxide composed of at least a quaternary compound of indium, gallium and/or aluminum, zinc and oxygen, and a difference between a work function value of the second electrode and a work function value of the first electrode being 0.4 eV or more; and a method of producing an electrode for the electronic device.

Claims

1. An electronic device, comprising:

a first electrode, a second electrode and a photoelectric conversion layer sandwiched between the first electrode and the second electrode, wherein

the second electrode is provided between the first electrode and a substrate,

the second electrode is composed of indium tin complex oxide, indium zinc complex oxide or tin oxide,

the first electrode including an amorphous oxide conductor composed of at least a quaternary compound of indium, zinc, gallium and oxygen or a quaternary compound of indium, zinc, aluminum and oxygen, and

a difference between a work function value of the second electrode and a work function value of the first electrode being 0.4 eV or more, and

wherein the first electrode includes the amorphous oxide conductor having a sheet resistance value of 3×

10 Ω

/square to 1×

10³ Ω

/square and composed of at least the quaternary compound that is a transparent conducting material.

2. The electronic device according to claim 1, wherein based on the difference between the work function value of the second electrode and the work function value of the first electrode, an internal electric field is generated in the photoelectric conversion layer to improve an internal quantum efficiency.

3. The electronic device according to claim 1, wherein

the work function value of the first electrode is 4.1 eV to 4.5 eV.

4. The electronic device according to claim 1, wherein

the first electrode is composed of indium gallium complex oxide, indium-doped gallium zinc complex oxide, aluminum oxide-doped zinc oxide or gallium-doped zinc oxide.

5. The electronic device according to claim 1, wherein

the first electrode has light transmittance of 80% or more at wavelengths of 400 nm to 660 nm.

6. The electronic device according to claim 1, wherein the amorphous oxide in the first electrode includes an oxygen defect.

7. A solid state imaging apparatus including the electronic device according to claim 1.

8. The solid state imaging apparatus according to claim 7, wherein the amorphous oxide in the first electrode includes an oxygen defect.

9. The electronic device according to claim 1, wherein the first electrode includes a single layer.