Differential split-electrode feedthrough cancellation mechanism
First Claim
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1. An electromechanical resonator comprising:
- a drive electrode set comprising at least one pair of alternating pole interdigitated drive electrodes;
a sense electrode set comprising at least one pair of alternating pole interdigitated sense electrodes;
a resonator between the drive electrode set and the sense electrode set;
a first gap between the drive electrode set and the resonator; and
a second gap between the sense electrode set and the resonator;
wherein the resonator comprises a dielectric material, a cylindrical shell, a fused quartz disk, or a doped semiconducting material.
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Abstract
An electromechanical resonator including a drive electrode set having at least one pair of alternating pole interdigitated drive electrodes and including a sense electrode set having at least one pair of alternating pole interdigitated sense electrodes.
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Citations
19 Claims
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1. An electromechanical resonator comprising:
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a drive electrode set comprising at least one pair of alternating pole interdigitated drive electrodes; a sense electrode set comprising at least one pair of alternating pole interdigitated sense electrodes; a resonator between the drive electrode set and the sense electrode set; a first gap between the drive electrode set and the resonator; and a second gap between the sense electrode set and the resonator; wherein the resonator comprises a dielectric material, a cylindrical shell, a fused quartz disk, or a doped semiconducting material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A phononic crystal acoustic processing device comprising:
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a piezoelectric interdigitated drive transducer; a phononic crystal coupled to the piezoelectric interdigitated drive transducer; and a piezoelectric interdigitated sense transducer coupled to the phononic crystal on a side of the phononic crystal opposite to the piezoelectric interdigitated drive transducer; wherein the piezoelectric interdigitated drive transducer comprises; a piezoelectric layer; and at least one pair of alternating pole interdigitated drive electrodes on the piezoelectric layer; and wherein the piezoelectric interdigitated sense transducer comprises; at least one pair of alternating pole interdigitated sense electrodes on the piezoelectric layer. - View Dependent Claims (14)
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15. A piezoelectric-on-substrate MEMS resonator comprising:
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a piezoelectric layer; a drive electrode set comprising at least one pair of alternating pole interdigitated drive electrodes on the piezoelectric layer; and a sense electrode set comprising at least one pair of alternating pole interdigitated sense electrodes on the piezoelectric layer and separated from the drive electrode set by a gap; wherein the drive electrode set is on a first side of the piezoelectric layer; and wherein the sense electrode set is on a second side of the piezoelectric layer opposite the first side. - View Dependent Claims (16)
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17. A device for providing alternating pole interdigitated drive electrodes and alternating pole interdigitated sense electrodes comprising:
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a first drive pad; a second drive pad; a first sense pad; a second sense pad; a first drive bus coupled to the first drive pad; a second drive bus coupled to the second drive pad; a first sense bus coupled to the first sense pad; a second sense bus coupled to the second sense pad; a plurality of first drive electrode fingers coupled to the first drive bus; a plurality of second drive electrode fingers coupled to the second drive bus; a plurality of first sense electrode fingers coupled to the first sense bus; a plurality of second sense electrode fingers coupled to the second sense bus; wherein the plurality of first drive electrode fingers are interdigitated with the plurality of second drive electrode fingers so that the first drive electrode fingers and the second drive electrode fingers alternate; and wherein the plurality of first sense electrode fingers are interdigitated with the plurality of second sense electrode fingers so that the first sense electrode fingers and the second sense electrode fingers alternate. - View Dependent Claims (18, 19)
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Specification