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Differential split-electrode feedthrough cancellation mechanism

  • US 10,236,858 B1
  • Filed: 08/26/2015
  • Issued: 03/19/2019
  • Est. Priority Date: 08/26/2015
  • Status: Active Grant
First Claim
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1. An electromechanical resonator comprising:

  • a drive electrode set comprising at least one pair of alternating pole interdigitated drive electrodes;

    a sense electrode set comprising at least one pair of alternating pole interdigitated sense electrodes;

    a resonator between the drive electrode set and the sense electrode set;

    a first gap between the drive electrode set and the resonator; and

    a second gap between the sense electrode set and the resonator;

    wherein the resonator comprises a dielectric material, a cylindrical shell, a fused quartz disk, or a doped semiconducting material.

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