Gradient force disk resonating gyroscope

• US 10,240,925 B1
• Filed: 03/28/2016
• Issued: 03/26/2019
• Est. Priority Date: 03/28/2016
• Status: Active Grant

• Current Assignee: HRL Laboratories LLC (The Boeing Co.)
• Original Assignee: HRL Laboratories LLC (The Boeing Co.)
• Inventors: Perahia, Raviv, Lake, Jonathan, Joyce, Richard J., Sorenson, Logan D.
• Primary Examiner(s): Huls, Natalie
• Assistant Examiner(s): Young, Monica S
• Application Number:
  US15/083,190
• Time in Patent Office: 1,093 Days
• Field of Search: 7350413
• CPC Class Codes: G01C 19/5684 the devices involving a micromechanical structure

Abstract

A gyroscope includes a vibratory structure, and a control mechanism including at least a first electrode, and at least a second electrode adjacent the first electrode, wherein the vibratory structure is separated from the control mechanism by a gap, wherein to drive a vibration in the vibratory structure, the control mechanism is configured to apply an alternating electrical voltage between the first electrode and the second electrode, and wherein to sense motion in the vibratory structure, the control mechanism is configured to apply a direct current voltage bias between the first electrode and the second electrode.

Claims

1. A gyroscope comprising:

a vibratory structure;

a first electrode separated from the vibratory structure by a gap; and

a second electrode directly adjacent the first electrode, the second electrode separated from the vibratory structure by the gap;

wherein to drive a vibration in the vibratory structure an alternating electrical voltage is applied between the first electrode and the second electrode;

wherein to sense motion in the vibratory structure a first direct current voltage bias is applied between the first electrode and the second electrode; and

wherein to tune a resonant frequency in the vibratory structure a second direct current voltage bias is applied between the first electrode and the second electrode.

2. The gyroscope of claim 1 wherein the vibratory structure comprises a dielectric.

3. The gyroscope of claim 1 wherein the vibratory structure comprises silica, fused silica, silicon, low expansion glass, silicon nitride, diamond, silicon carbide, or sapphire.

4. The gyroscope of claim 1:

wherein the gyroscope is a disk resonating gyroscope; and

wherein the vibratory structure comprises a disk.

5. The gyroscope of claim 1:

wherein the vibratory structure comprises a disk, the disk comprising a solid disk, a disk having a plurality of openings in the disk, or a disk having a plurality of closed loops.

6. The gyroscope of claim 5 wherein the plurality of openings in the disk comprise curved slots or circular openings.

7. The gyroscope of claim 1:

wherein the vibratory structure comprises a disk; and

wherein the first electrode and the second electrode are adjacent to a periphery of the disk.

8. The gyroscope of claim 7:

wherein the disk has a thickness; and

the first electrode and the second electrode have a height that is substantially the same as the thickness of the disk.

9. The gyroscope of claim 7 wherein the control mechanism further comprises:

at least a third electrode; and

at least a fourth electrode adjacent the third electrode;

wherein the third electrode and the fourth electrode are adjacent to one another and adjacent to the periphery of the disk and are on a opposite side of the periphery of the disk than the first electrode and the second electrode;

wherein to drive a vibration in the vibratory structure, the control mechanism is configured to apply an alternating electrical voltage between the third electrode and the fourth electrode; and

wherein to sense motion in the vibratory structure, the control mechanism is configured to apply a direct current voltage bias between the third electrode and the fourth electrode.

10. The gyroscope of claim 1 further comprising:

a substrate;

wherein the first electrode and the second electrode are on the substrate and separated from the vibratory structure by the gap.

11. The gyroscope of claim 10:

wherein the first electrode and the second electrode are below the vibratory structure.

12. The gyroscope of claim 11 further comprising:

at least a third electrode; and

at least a fourth electrode directly adjacent the third electrode;

wherein the third electrode and the fourth electrode are above the vibratory structure.

13. The gyroscope of claim 12:

wherein to drive an out of plane motion in the vibratory structure a direct current electrical voltage is applied between the first and third electrodes, between the first and fourth electrodes, between the second and third electrodes, between the second and the fourth electrodes, or between the first and second electrodes and the third and fourth electrodes.

14. The gyroscope of claim 12:

wherein to sense an out of plane motion in the vibratory structure a direct current electrical voltage is applied between the first and third electrodes, between the first and fourth electrodes, between the second and third electrodes, between the second and the fourth electrodes, or between the first and second electrodes and the third and fourth electrodes.

15. The gyroscope of claim 10:

wherein the first electrode and the second electrode are near an edge of the vibratory structure.

16. A method of providing a gyroscope comprising:

providing a vibratory structure; and

providing a first electrode separated from the vibratory structure by a gap; and

providing a second electrode directly adjacent the first electrode, the second electrode separated from the vibratory structure by the gap;

wherein to drive a vibration in the vibratory structure an alternating electrical voltage is applied between the first electrode and the second electrode; and

wherein to sense motion in the vibratory structure a first direct current voltage bias is applied between the first electrode and the second electrode; and

wherein to tune a resonant frequency in the vibratory structure a second direct current voltage bias is applied between the first electrode and the second electrode.

17. The method of claim 16 wherein the vibratory structure comprises a dielectric or a disk.

18. The method of claim 16 wherein the vibratory structure comprises silica, fused silica, silicon, low expansion glass, silicon nitride, diamond, silicon carbide, or sapphire.

19. The method of claim 16:

wherein the first electrode and the second electrode are below the vibratory structure.

20. The method of claim 19 further comprising:

at least a third electrode; and

at least a fourth electrode directly adjacent the third electrode;

wherein the third electrode and the fourth electrode are above the vibratory structure.

21. The method of claim 20:

wherein to sense an out of plane motion in the vibratory structure a direct current electrical voltage is applied between the first and third electrodes, between the first and fourth electrodes, between the second and third electrodes, between the second and the fourth electrodes, or between the first and second electrodes and the third and fourth electrodes.

22. The method of claim 20:

wherein to drive an out of plane motion in the vibratory structure a direct current electrical voltage is applied between the first and third electrodes, between the first and fourth electrodes, between the second and third electrodes, between the second and the fourth electrodes, or between the first and second electrodes and the third and fourth electrodes.