Spectroscopic sensor device and electronic equipment

• US 10,241,033 B2
• Filed: 06/23/2016
• Issued: 03/26/2019
• Est. Priority Date: 03/05/2010
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: Uematsu, Akira, Sato, Yoichi, Komatsu, Akira, Yano, Kunihiko
• Primary Examiner(s): Ton, Tri
• Assistant Examiner(s): Phillips, Rufus
• Application Number:
  US15/190,875
• Publication Number:
  US 20160305868A1
• Time in Patent Office: 1,006 Days
• Field of Search: None
• CPC Class Codes: G01J 2003/1226 Interference filters
• CPC Class Codes: G01J 3/02 Details
• CPC Class Codes: G01J 3/0256 Compact construction
• CPC Class Codes: G01J 3/0259 Monolithic
• CPC Class Codes: G01J 3/0262 Constructional arrangements for removing stray light
• CPC Class Codes: G01J 3/0278 Control or determination of height or angle information for sensors or receivers
• CPC Class Codes: G01J 3/28 Investigating the spectrum using colour filters G01J3/51
• CPC Class Codes: G01J 3/36 Investigating two or more bands of a spectrum by separate detectors
• CPC Class Codes: G01J 3/51 using colour filters
• CPC Class Codes: G01N 21/31 Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry G01N21/72 takes precedence
• CPC Class Codes: G02B 5/285 comprising deposited thin solid films G02B5/281 - G02B5/289 take precedence; multilayered film filters for fibre optic multiplexing G02B6/29361
• CPC Class Codes: G02B 7/006 Filter holders
• CPC Class Codes: H01L 27/1443 with at least one potential jump or surface barrier
• CPC Class Codes: H01L 27/14625 Optical elements or arrangements associated with the device

Abstract

A spectroscopic sensor that applies lights in a wavelength band containing plural wavelengths to an object and spectroscopically separates reflected lights or transmitted lights from the object using plural light band-pass filters that transmit the respective specific wavelengths and plural photosensor parts to which corresponding transmitted lights are input based on output results of independent photosensors. The spectroscopic sensor may be integrated in a semiconductor device or module by integration using a semiconductor process and downsizing may be realized.

Claims

1. A pulsimeter comprising:

a light source unit that transmits light to a body of a user; and

a spectroscopic sensor that receives incident light from the light source unit reflected from or transmitted through the body of the user,

the spectroscopic sensor including;

a photosensor that has an impurity area formed on a semiconductor substrate, and

an angle limiting filter that includes a plurality of light blocking materials which have electrical conductivity, at least one of the light blocking materials being disposed directly on and contacting the impurity area.

2. The pulsimeter of claim 1, wherein

the light blocking material includes a light absorbing material.

3. The pulsimeter of claim 1, wherein

the light blocking material is formed by a conducting plug provided in an insulating material disposed on the semiconductor substrate.

4. The pulsimeter of claim 3, wherein

the conducting plug is formed in a contact hole provided in the insulating material.

5. The pulsimeter of claim 1, wherein

the light blocking material is comprised of tungsten or titanium nitride.

6. The pulsimeter of claim 1, wherein

the plurality of light blocking materials is formed in lattice form in a plan view.

7. The pulsimeter of claim 1, wherein

the angle limiting filter transmits an electrical signal from the impurity region.

8. The pulsimeter of claim 1, wherein

the angle limiting filter is an electrode of the spectroscopic sensor.

9. The pulsimeter of claim 1, wherein

the plurality of light blocking materials is disposed directly on and contacting the impurity area.

10. A spectroscopic sensor comprising:

a light source unit that transmits light to a body of a user; and

a photo sensor that detects incident light from the light source unit reflected from or transmitted through the body of the user,

the photo sensor comprising;

an impurity area formed on a semiconductor substrate, and

an angle limiting filter that is formed by a plurality of light blocking materials which have electrical conductivity, at least one of the light blocking materials being disposed directly on and contacting the impurity area.

11. The spectroscopic sensor of claim 10, wherein

the light blocking material includes a light absorbing material.

12. The spectroscopic sensor of claim 10, wherein

the light blocking material is formed by a conducting plug provided in an insulating material disposed on the semiconductor substrate.

13. The spectroscopic sensor of claim 12, wherein

the conducting plug is formed in a contact hole provided in the insulating material.

14. The spectroscopic sensor of claim 10, wherein

the light blocking material is comprised of tungsten or titanium nitride.

15. The spectroscopic sensor of claim 10, wherein

the plurality of light blocking materials is formed in lattice form in a plan view.

16. The spectroscopic sensor of claim 10, wherein

the angle limiting filter transmits an electrical signal from the impurity region.

17. The spectroscopic sensor of claim 10, wherein

the angle limiting filter is an electrode of the photo sensor.

18. The spectroscopic sensor of claim 10, wherein

the plurality of light blocking materials is disposed directly on and contacting the impurity area.