Concentration measuring method
First Claim
1. A concentration measuring method for optically measuring a concentration of a predetermined chemical component in an object to be measured, the method comprising the steps of:
- irradiating at least light (1) having a first wavelength (λ
1) that has an absorbability with respect to the chemical component, and light (2) having a second wavelength (λ
2) that has no or substantially no absorbability with respect to the chemical component, or an absorbability that is relatively lower than that of the light (1), from light-emitting unit toward the object to be measured using a time-sharing method;
sequentially receiving the light that is produced by the irradiation and passes through the object to be measured by light-receiving unit;
inputting a first light-receiving signal (1) based on the light (1) and a second light-receiving signal (2) based on the light (2), each produced by the received light into differential signal forming unit;
deriving the concentration of the predetermined chemical component from a measured value based on a differential signal output from the differential signal forming unit in accordance with the input, and data stored in storage unit in advance; and
feeding back a feedback signal corresponding to the differential signal to light emission amount control unit for controlling a light emission amount of the light-emitting unit and/or the differential signal forming unit.
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Accused Products
Abstract
A concentration measurement method accurately, quickly, and non-destructively measures the concentration of a predetermined chemical component within an object to a nano-order trace concentration level in real time. A time sharing method irradiates the object light of a first wavelength and light of a second wavelength having different light absorption rates with respect to the object to be measured. Light of both wavelengths that arrives optically through the object is received by a shared light reception sensor, and signals respectively relating to light of the first and second wavelengths are output from the light reception sensor in accordance with the received light. A differential signal of these signals is formed, and the concentration of a chemical component in the object to be measured is derived on the basis of the differential signal.
7 Citations
20 Claims
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1. A concentration measuring method for optically measuring a concentration of a predetermined chemical component in an object to be measured, the method comprising the steps of:
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irradiating at least light (1) having a first wavelength (λ
1) that has an absorbability with respect to the chemical component, and light (2) having a second wavelength (λ
2) that has no or substantially no absorbability with respect to the chemical component, or an absorbability that is relatively lower than that of the light (1), from light-emitting unit toward the object to be measured using a time-sharing method;sequentially receiving the light that is produced by the irradiation and passes through the object to be measured by light-receiving unit; inputting a first light-receiving signal (1) based on the light (1) and a second light-receiving signal (2) based on the light (2), each produced by the received light into differential signal forming unit; deriving the concentration of the predetermined chemical component from a measured value based on a differential signal output from the differential signal forming unit in accordance with the input, and data stored in storage unit in advance; and feeding back a feedback signal corresponding to the differential signal to light emission amount control unit for controlling a light emission amount of the light-emitting unit and/or the differential signal forming unit. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A concentration measuring method for optically measuring a concentration of a predetermined chemical component in an object to be measured, the method comprising the steps of:
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irradiating at least light having a first wavelength that has an absorbability with respect to the chemical component, and light having a second wavelength that has no or substantially no absorbability with respect to the chemical component, or an absorbability that is relatively lower than that of the light having the first wavelength, from a single light-emitting unit toward the object to be measured using a time-sharing method; sequentially receiving the light that is produced by the irradiation and passes through the object to be measured in a time-sharing manner by a single light-receiving unit; inputting a first light-receiving signal based on the light having the first wavelength and a second light-receiving signal based on the light having the second wavelength, each produced by the received light, into differential signal forming unit; deriving the concentration of the predetermined chemical component from a measured value based on an output signal output from the differential signal forming unit in accordance with the input, and data stored in storage unit in advance; and controlling a light emission amount of the light-emitting unit on the basis of a feedback signal corresponding to the differential signal. - View Dependent Claims (9, 10, 11, 12, 13)
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14. A concentration measuring method, comprising the steps of:
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irradiating at least light having a first wavelength and light having a second wavelength, each having a different light absorptivity with respect to an object to be measured, onto the object to be measured using a time-sharing method; sequentially receiving the light of each wavelength that optically passes through the object to be measured as a result of the irradiation of the light of each wavelength, using a common light-receiving sensor; forming a differential signal between a signal related to the light having the first wavelength and a signal related to the light having the second wavelength output from the light-receiving sensor in accordance with the received light; deriving a concentration of a chemical component in the object to be measured on the basis of the differential signal; and controlling the amount of light during the emission of at least one of the light having the first wavelength and the light having the second wavelength on the basis of a feedback signal corresponding to the differential signal. - View Dependent Claims (15, 16, 17)
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18. A concentration measuring method, comprising the steps of:
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irradiating at least a first light and a second light, each having a different light absorptivity with respect to an object to be measured, onto the object to be measured using a time-sharing method; receiving each light that optically passes through the object to be measured by irradiation of each light onto the object to be measured, using a common light-receiving sensor; forming a differential signal on the basis of a signal related to the first light and a signal related to the second light output from the light-receiving sensor in accordance with the received light; deriving a concentration of a predetermined chemical component in the object to be measured on the basis of the differential signal; and controlling the amount of light during the emission of at least one of the light having the first wavelength and the light having the second wavelength on the basis of a feedback signal corresponding to the differential signal.
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19. A concentration measuring method, comprising the steps of:
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irradiating at least light having a first wavelength and light having a second wavelength, each having a different light absorptivity with respect to an object to be measured, onto the object to be measured using a time-sharing method; receiving the light of each wavelength that optically passes through the object to be measured as a result of the irradiation of the light of each wavelength, using a common light-receiving sensor; forming a differential signal between a signal related to the light having the first wavelength and a signal related to the light having the second wavelength output from the light-receiving sensor in accordance with the received light; deriving a concentration of a chemical component in the object to be measured on the basis of the differential signal; and controlling the amount of light during the emission of at least one of the light having the first wavelength and the light having the second wavelength on the basis of a feedback signal corresponding to the differential signal.
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20. A concentration measuring method, comprising the steps of:
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irradiating at least a first light and a second light, each having a different light absorptivity with respect to an object to be measured, onto the object to be measured using a time-sharing method; receiving each light that optically passes through the object to be measured by irradiation of each light onto the object to be measured, using a common light-receiving sensor; forming a differential signal on the basis of a signal related to the first light and a signal related to the second light output from the light-receiving sensor in accordance with the received light; deriving a concentration of a predetermined chemical component in the object to be measured on the basis of the differential signal; and controlling the amount of light during the emission of at least one of the light having the first wavelength and the light having the second wavelength on the basis of a feedback signal corresponding to the differential signal.
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Specification