MEMS piston-tube based capacitive accelerometer

• US 10,241,129 B1
• Filed: 02/16/2016
• Issued: 03/26/2019
• Est. Priority Date: 08/01/2014
• Status: Active Grant

• Current Assignee: Sheba Micorsystems Inc.
• Original Assignee: Faez Ba-Tis, Ridha Ben-Mrad
• Inventors: Ba-Tis, Faez, Ben-Mrad, Ridha
• Primary Examiner(s): Martin, Edgardo San
• Application Number:
  US15/044,131
• Time in Patent Office: 1,134 Days
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 2201/033 Comb drives
• CPC Class Codes: B81B 2203/053 Translation according to an axis perpendicular to the substrate
• CPC Class Codes: B81B 3/0086 Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0837 the mass being suspended so as to only allow movement perpendicular to the plane of the substrate, i.e. z-axis sensor

Abstract

A novel high resolution, low noise MEMS capacitive accelerometer is disclosed. The accelerometer utilizes a piston-tube electrode configuration that enables the use of a wide area for the electrodes. Therefore, a high capacitive sensitivity is achieved. The accelerometer consists of two structures: upper and lower. The lower structure contains a plurality of fixed electrodes that are attached to the base and have a piston-style shape (teeth). Those pistons form the sensing electrodes of the accelerometer. The upper structure contains a plurality of moving electrodes that have a tube-style shape (through holes), and they are attached to a substrate via restoring mechanical springs. The proof mass of the accelerometer is distributed around these tubes to reduce squeeze thin film damping in the system. The accelerometer is able to sense linear acceleration along the z-axis and/or the angular acceleration about the in-plane axes (x and y).

Claims

1. A MEMS capacitive accelerometer, comprising:

a. a first base plate having a top surface and a thickness;

b. an array of spaced apart teeth electrodes constructed in the thickness of said base plate;

c. each said tooth electrode having a shape, a length, a height, and a thickness;

d. said array of teeth being grouped in one or multiple sub-arrays of teeth each comprising one or more teeth, wherein the teeth in each sub-array of teeth being electrically connected to each other and electrically isolated from other sub-arrays of teeth;

e. each sub-array of teeth being electrically addressable, whereby each sub-array of teeth forms a sensing electrode of said accelerometer;

f. a second plate attached to said base plate and having a structure sized to fit on said base plate, said second plate having a fixed peripheral structure and a moving central structure, whereby the fixed structure being attached to the base plate and the moving central structure forms a proof mass of said accelerometer;

g. an array of spaced apart openings constructed in the thickness of said moving structure said second plate;

h. said array of openings sized and designed to receive and interdigitate with said array of teeth, and said array of openings with each said opening having a length, a width and a height, whereby said array of openings forms a moving electrode of said accelerometer;

i. a plurality of spring means supports and holds said moving structure of said second plate wherein said openings are aligned with respect to said array of teeth and to return the said moving structure to its initial position in the absence of external acceleration, each said spring having a length, a thickness, and a height,

whereby the teeth of the base plate penetrate into the openings of the top plate in response to linear acceleration along an out-of-plane axis (z-axis), or/and rotational acceleration about an in-plane axes (x and y) being measured by means of capacitance change detection that is formed between the teeth and the openings.

2. The MEMS capacitive accelerometer of claim 1, wherein said array of teeth electrodes being arc shaped and being radially co-centric with a predefined radial spacing.

3. The MEMS capacitive accelerometer of claim 1, wherein said array of teeth electrodes being substantially rectangular, circular, triangular, trapezoidal, pentagonal, or hexagonal shaped, and each said sub-array of teeth being aligned linearly along their length and forming several linear rows in each said sub-array.

4. The MEMS capacitive accelerometer of claim 1, wherein said array of teeth electrodes being substantially rectangular, circular, triangular, trapezoidal, pentagonal, or hexagonal shaped, and each said sub-array of teeth being aligned radially along their length and forming several curved rows in each said sub-array.

5. The MEMS capacitive accelerometer of claims 3 and 4, wherein said sensing tooth electrodes and moving electrode (openings) form four capacitors.

6. The MEMS capacitive accelerometer of claim 1, wherein the proof mass is partially solid (lumped) at the center of the said moving structure of said second plate, and surrounded by an array of openings.

7. The MEMS capacitive accelerometer of claim 1, wherein said springs being long springs having high ratio of a longitudinal stiffness to a transverse stiffness to allow for a large travel range of the proof mass.

8. The MEMS capacitive accelerometer of claim 1, wherein said springs being extended radially inwards.

9. The MEMS capacitive accelerometer of claim 1, wherein said springs having the same thickness as the height of the opening, whereby eliminating the fabrication step needed for etching the second plate to soften the springs, thereby simplifying the fabrication process.

10. The MEMS capacitive accelerometer of claim 1, wherein a plurality of said pistons are extended upward such that their top surfaces are at the same plane with top surface of said second plate.

11. The MEMS capacitive accelerometer of claim 10, wherein said accelerometer measures the linear acceleration along two directions of the out-of-plane axis.