Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method

• US 10,241,417 B2
• Filed: 05/08/2013
• Issued: 03/26/2019
• Est. Priority Date: 02/06/2004
• Status: Active Grant

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Tanitsu, Osamu, Shigematsu, Koji, Hirota, Hiroyuki, Matsuyama, Tomoyuki
• Primary Examiner(s): LaPage, Michael P
• Application Number:
  US13/889,860
• Publication Number:
  US 20130242527A1
• Time in Patent Office: 2,148 Days
• Field of Search: 356364-370
• CPC Class Codes: F21V 13/02 Combinations of only two kinds of elements
• CPC Class Codes: F21V 9/14 for producing polarised light
• CPC Class Codes: G02B 27/0977 Reflective elements
• CPC Class Codes: G02B 27/286 for controlling or changing the state of polarisation, e.g. transforming one polarisation state into another G02B5/3083 takes precedence; light guide coupling means utilising polarising elements G02B6/34
• CPC Class Codes: G02B 5/3025 Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state G02B5/3008, G02B5/3016 take precedence
• CPC Class Codes: G03F 7/701 Off-axis setting using an aperture
• CPC Class Codes: G03F 7/70191 Optical correction elements, filters or phase plates for controlling intensity, wavelength, polarisation, phase or the like
• CPC Class Codes: G03F 7/70308 Optical correction elements, filters or phase plates for manipulating imaging light, e.g. intensity, wavelength, polarisation, phase or image shift
• CPC Class Codes: G03F 7/70566 Polarisation control

Abstract

There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially varying thickness profile.

Claims

1. An illumination optical apparatus which illuminates an object with illumination light, the illumination optical apparatus comprising:

a fly'"'"'s eye lens arranged in an optical path of the illumination light so that a rear focal plane of the fly'"'"'s eye lens is substantially located on an illumination pupil plane of the illumination optical apparatus;

a plurality of optical elements arranged in the optical path on an incidence side of the fly'"'"'s eye lens so as to be movable relative to each other, which transforms a beam of the illumination light to form a light intensity distribution of the illumination light on the illumination pupil plane by moving the plurality of optical elements relative to each other, the light intensity distribution on the illumination pupil plane being in a state in which a light intensity in a region being away from an optical axis of the illumination optical apparatus is larger than a light intensity on the optical axis on the illumination pupil plane;

a polarization modulating member made of an optical material with optical activity and provided with different thicknesses of the optical material in a direction of the optical axis at different positions on an entrance surface of the polarization modulating member, the polarization modulating member being arranged in the optical path on the incidence side of the fly'"'"'s eye lens to rotate a polarization direction of the illumination light and forming a linearly polarized state of the illumination light on the illumination pupil plane by rotating the polarization direction of the illumination light, the linearly polarized state having polarization directions being substantially coincident with an azimuthal direction about the optical axis or a radial direction centered around the optical axis in the region away from the optical axis; and

an optical system including a lens element arranged in the optical path of the illumination light from the fly'"'"'s eye lens,

wherein the polarization modulating member is arranged so that a direction of an optic axis of the optical material is substantially coincident with a direction of the optical axis.

2. The illumination optical apparatus according to claim 1, wherein the optical system irradiates the object with the illumination light from the fly'"'"'s eye lens in a polarization state in which a principal component is S-polarized light with respect to the object.

3. The illumination optical apparatus according to claim 1, wherein a first thickness of the polarization modulating member in an optical path of a first part of the illumination light is different from a second thickness of the polarization modulating member in an optical path of a second part of the illumination light, and

the first part of the illumination light passes through a first portion of the region on the illumination pupil plane, and the second part of the illumination light passes through a second portion of the region different from the first portion.

4. The illumination optical apparatus according to claim 3, further comprising a polarization converter arranged in the optical path on an incidence side of the polarization modulating member, wherein

the polarization converter converts a polarization state of the illumination light from a first polarization state including a substantially single polarization into a second polarization state different from the first polarization state.

5. The illumination optical apparatus according to claim 4, wherein a principal component of the second polarization state is linearly polarized light polarized substantially in the single direction.

6. The illumination optical apparatus according to claim 4, wherein a principal component of the first polarization state is linearly polarized light, circularly polarized light or elliptically polarized light.

7. The illumination optical apparatus according to claim 4, wherein the polarization converter comprises at least one of a half wavelength plate and a quarter wavelength plate.

8. The illumination optical apparatus according to claim 4, wherein the first and second portions are included in an annular region about the optical axis.

9. The illumination optical apparatus according to claim 8, wherein the first and second portions are substantially discrete from each other.

10. The illumination optical apparatus according to claim 4, wherein the first and second portions are substantially discrete from each other and are aligned along a circumference about the optical axis.

11. The illumination optical apparatus according to claim 3, wherein the first and second portions are included in an annular region about the optical axis.

12. The illumination optical apparatus according to claim 11, wherein the first and second portions are substantially discrete from each other.

13. The illumination optical apparatus according to claim 3, wherein the first and second portions are substantially discrete from each other and are aligned along a circumference about the optical axis.

14. The illumination optical apparatus according to claim 1, further comprising a polarization converter arranged in the optical path on an incidence side of the polarization modulating member, wherein

the polarization converter converts a polarization state of the illumination light from a first polarization state including a substantially single polarization into a second polarization state different from the first polarization state.

15. The illumination optical apparatus according to claim 14, wherein a principal component of the second polarization state is linearly polarized light polarized substantially in the single direction.

16. The illumination optical apparatus according to claim 14, wherein a principal component of the first polarization state is linearly polarized light, circularly polarized light or elliptically polarized light.

17. The illumination optical apparatus according to claim 14, wherein the polarization converter comprises at least one of a half wavelength plate and a quarter wavelength plate.

18. An exposure apparatus which exposes a substrate to light via an object having a pattern, the exposure apparatus comprising:

a stage which holds the substrate,

the illumination optical apparatus as defined in claim 1 which illuminates the pattern with the light; and

a projection optical system which projects an image of the pattern illuminated with the light onto the substrate held by the stage.

19. The exposure apparatus according to claim 18, wherein the substrate is exposed to the light through a liquid.

20. The exposure apparatus according to claim 18, wherein the illumination optical apparatus illuminates the object with the light in a polarization state in which a principal component is S-polarized light with respect to the object.

21. The exposure apparatus according to claim 18, wherein a first thickness of the polarization modulating member in an optical path of a first part of the light is different from a second thickness of the polarization modulating member in an optical path of a second part of the light, and

the first part of the light passes through a first portion of the region on the illumination pupil plane, and the second part of the light passes through a second portion of the region different from the first portion.

22. The exposure apparatus according to claim 21, further comprising a polarization converter arranged in the optical path on an incidence side of the polarization modulating member, wherein

the polarization converter converts a polarization state of the light from a first polarization state including a substantially single polarization into a second polarization state different from the first polarization state.

23. The exposure apparatus according to claim 22, wherein a principal component of the second polarization state is linearly polarized light polarized substantially in the single direction.

24. The exposure apparatus according to claim 22, wherein a principal component of the first polarization state is linearly polarized light, circularly polarized light or elliptically polarized light.

25. The exposure apparatus according to claim 22, wherein the polarization converter comprises at least one of a half wavelength plate and a quarter wavelength plate.

26. The exposure apparatus according to claim 21, wherein the first and second portions are included in an annular region about the optical axis.

27. The exposure apparatus according to claim 26, wherein the first and second portions are substantially discrete from each other.

28. The exposure apparatus according to claim 21, wherein the first and second portions are substantially discrete from each other and are aligned along a circumference about the optical axis.

29. A device manufacturing method, comprising:

transferring a pattern to a substrate by using the exposure apparatus as defined in claim 18; and

developing the substrate to which the pattern is transferred.

30. An exposure method which exposes a substrate to light via an object having a pattern, the exposure method comprising:

holding the substrate by a stage;

illuminating the pattern with the light by using the illumination optical apparatus as defined in claim 1; and

projecting an image of the pattern illuminated with the light onto the substrate held by the stage.

31. The exposure method according to claim 30, wherein the substrate is exposed to the light through liquid.

32. A device manufacturing method, comprising:

transferring a pattern to a substrate by using the exposure method as defined in claim 30; and

developing the substrate to which the pattern is transferred.