Fluidic assembly using tunable suspension flow

• US 10,243,097 B2
• Filed: 09/09/2016
• Issued: 03/26/2019
• Est. Priority Date: 09/09/2016
• Status: Active Grant

• Current Assignee: Elux Inc.
• Original Assignee: Elux Inc.
• Inventors: Yuen, Po Ki
• Primary Examiner(s): Mui, Christine T
• Application Number:
  US15/260,417
• Publication Number:
  US 20180076068A1
• Time in Patent Office: 928 Days
• Field of Search: 422502, 422500, 422 50
• CPC Class Codes: G05D 7/0694 by action on throttling means or flow sources of very small size, e.g. microfluidics microvalves F16K99/0001; microstructural devices per se B81B
• CPC Class Codes: H01L 2224/95001 involving a temporary auxiliary member not forming part of the bonding apparatus, e.g. removable or sacrificial coating, film or substrate
• CPC Class Codes: H01L 2224/95085 being a liquid, e.g. for fluidic self-assembly
• CPC Class Codes: H01L 2224/95101 in a liquid medium
• CPC Class Codes: H01L 25/0753 the devices being arranged next to each other
• CPC Class Codes: H01L 27/15 including semiconductor components having potential barriers, specially adapted for light emission
• CPC Class Codes: H01L 2924/12041 LED
• CPC Class Codes: H01L 33/00 Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof H10K50/00 takes precedence; devices consisting of a plurality of semiconductor components formed in or on a common substrate and including semiconductor components having potential barriers, specially adapted for light emission H01L27/15; semiconductor lasers H01S5/00
• CPC Class Codes: H01L 33/0095 Post-treatment of devices, e.g. annealing, recrystallisation or short-circuit elimination

Abstract

Embodiments are related to systems and methods for fluidic assembly, and more particularly to systems and methods for increasing the efficiency of fluidic assembly.

Claims

1. A fluidic assembly system, the system comprising:

a fluidic flow chamber formed over a substrate including a plurality of wells on at least a top surface of the substrate, wherein the fluidic flow chamber includes a top plate and side walls, and wherein at least the top surface of the substrate is in contact with a suspension within the fluidic flow chamber; and

a flow oscillator operable to selectably move the suspension within the fluidic flow chamber over the top surface of the substrate in at least a first direction and a second direction, wherein the suspension includes a plurality of micro-components and a carrier liquid.

2. The fluidic assembly system of claim 1, wherein the flow oscillator is further operable to selectably move the suspension within the fluidic flow chamber at a selected magnitude of fluid velocity in a selected one of the first direction or the second direction.

3. The fluidic assembly system of claim 1, wherein the first direction is away from the flow oscillator and the second direction is toward the flow oscillator.

4. The fluidic assembly system of claim 1, wherein the top plate is at least partially transparent, the system further comprising:

a vision system operable to capture images of the location of micro-components relative to the plurality of wells through the top plate.

5. The fluidic assembly system of claim 4, the system further comprising:

an automated oscillation controller operable to;

receive the images from the vision system;

select one of the first direction or the second direction as a desired direction based at least in part on the images; and

command the flow oscillator to produce the desired direction of flow of the suspension within the fluidic flow chamber.

6. The fluidic assembly system of claim 5, wherein the automated oscillation controller is further operable to:

based at least in part on the images, select a desired magnitude of fluid velocity of the suspension within the fluidic flow chamber as a selected fluid velocity; and

command the flow oscillator to produce the selected fluid velocity of the suspension within the fluidic flow chamber.

7. The fluidic assembly system of claim 1, the system further comprising:

a suspension reservoir operable to hold a portion of the suspension outside of the fluidic flow chamber.

8. The fluidic assembly system of claim 1, wherein the micro-components are light emitting diodes.

9. The fluidic assembly system of claim 1, wherein the substrate further includes one or more control channels extending along a top surface of the substrate.

10. The fluidic assembly system of claim 9, wherein the one or more control channels extending a first distance below the top surface of the substrate, and wherein at least a subset of the plurality of wells are within one of the one or more control channels and extend as second distance below the top surface of the substrate.

11. The fluidic assembly system of claim 9, wherein the control channels are substantially parallel to the first direction and the second direction.

12. The fluidic assembly system of claim 1, wherein the top plate includes at least one deflection bar extending down toward the substrate that is substantially perpendicular to the first direction and the second direction.

13. The fluidic assembly system of claim 1, wherein at least one of the side walls includes an uneven edge extending into the fluidic flow chamber toward another of the side walls.

14. The fluidic assembly system of claim 1, wherein the flow oscillator is a pump configured to provide a range of tunable fluidic flow.

15. The fluidic assembly system of claim 1, wherein the flow oscillator is a first flow oscillator, the system further comprising:

a second flow oscillator operable to move a suspension within the fluidic flow chamber in at least the first direction and the second direction.

16. The fluidic assembly system of claim 1, wherein the flow oscillator is a first flow oscillator, the system further comprising:

a second flow oscillator operable to move a suspension within the fluidic flow chamber in at least a third direction and a fourth second direction, wherein the third direction is away from the second flow oscillator and the fourth direction is toward the second flow oscillator, and wherein the third direction and the fourth direction are substantially perpendicular to the first direction and the second direction.

18. The fluidic assembly system of claim 9, wherein the control channels are substantially perpendicular to the first direction and the second direction.

17. A fluidic assembly system, the system comprising:

a fluidic flow chamber formed by a substrate, a top plate, and side walls, wherein the substrate includes a plurality of wells extending below a top surface of the substrate; and

a flow oscillator fluidically coupled to the fluidic flow chamber and configured to;

pump a suspension within the fluidic flow chamber in a first direction at a first selectable magnitude of fluidic flow toward the flow oscillator, and pump the suspension within the fluidic flow chamber in a second direction at a second magnitude of fluidic flow away from the flow oscillator, wherein the suspension includes a plurality of micro-components and a carrier liquid.

a suspension reservoir fluidically coupled to the fluidic flow chamber and configured to hold a portion of the suspension outside of the fluidic flow chamber;

a vision system configured to capture images of the location of micro-components relative to the plurality of wells through the top plate; and

an automated oscillation controller configured to;

receive the images from the vision system;

select one of the first direction and the second direction as a selected direction of flow of the suspension within the fluidic flow chamber based at least in part on the images;

select a magnitude of fluidic flow within the fluidic flow chamber as a selected magnitude of fluidic flow based at least in part on the images; and

command the flow oscillator to produce the selected direction and the selected magnitude of fluidic flow of the suspension within the fluidic flow chamber.

19. The fluidic assembly system of claim 17, wherein the first selectable magnitude is the same as the second selectable magnitude.

20. The fluidic assembly system of claim 17, wherein the first direction is away from the flow oscillator and the second direction is toward the flow oscillator.

21. The fluidic assembly system of claim 17, wherein the micro-components are light emitting diodes.

22. The fluidic assembly system of claim 17, wherein the substrate further includes one or more control channels extending along a top surface of the substrate.

23. The fluidic assembly system of claim 17, wherein the substrate further includes one or more control channels extending a first distance below the top surface of the substrate, and wherein at least a subset of the plurality of wells are within one of the one or more control channels and extend as a second distance below the top surface of the substrate.

24. The fluidic assembly system of claim 17, wherein the top plate includes at least one deflection bar extending down toward the substrate that is substantially perpendicular to the first direction and the second direction.

25. The fluidic assembly system of claim 17, wherein the flow oscillator is a first flow oscillator, the system further comprising:

a second flow oscillator operable to move a suspension within the fluidic flow chamber in at least a third direction and a fourth second direction, wherein the third direction is away from the second flow oscillator and the fourth direction is toward the second flow oscillator.