Substrate features for enhanced fluidic assembly of electronic devices

• US 10,243,098 B2
• Filed: 01/01/2018
• Issued: 03/26/2019
• Est. Priority Date: 09/15/2016
• Status: Active Grant

• Current Assignee: Elux Inc.
• Original Assignee: Elux Inc.
• Inventors: Heine, David Robert, Garner, Sean Mathew, Shinde, Avinash Tukaram
• Primary Examiner(s): Yi, Changhyun
• Application Number:
  US15/859,672
• Publication Number:
  US 20180145207A1
• Time in Patent Office: 449 Days
• CPC Class Codes: H01L 2224/95001 involving a temporary auxiliary member not forming part of the bonding apparatus, e.g. removable or sacrificial coating, film or substrate
• CPC Class Codes: H01L 2224/95085 being a liquid, e.g. for fluidic self-assembly
• CPC Class Codes: H01L 25/0753 the devices being arranged next to each other
• CPC Class Codes: H01L 2933/0033 relating to semiconductor body packages
• CPC Class Codes: H01L 33/005 Processes
• CPC Class Codes: H01L 33/0095 Post-treatment of devices, e.g. annealing, recrystallisation or short-circuit elimination
• CPC Class Codes: H01L 33/06 within the light emitting region, e.g. quantum confinement structure or tunnel barrier
• CPC Class Codes: H01L 33/20 with a particular shape, e.g. curved or truncated substrate
• CPC Class Codes: H01L 33/32 containing nitrogen
• CPC Class Codes: H01L 33/38 with a particular shape

Abstract

Embodiments are related to systems and methods for fluidic assembly, and more particularly to systems and methods for assuring deposition of elements in relation to a substrate. In some cases, embodiments include a substrate including a plurality of wells each having a sidewall where a through hole via extends from a bottom of at least one of the plurality of wells; and a post enhanced diode including a post extending from a top surface of a diode structure.

Claims

1. A fluidic assembly system, the system comprising:

a substrate including a an plurality of polygonal wells, wherein each of the polygonal wells has a sidewall defining an polygonal outer perimeter of the respective polygonal well and extending from one surface of the substrate to a depth within the substrate, and wherein each of the polygonal wells is sized to accept a single disk shaped device; and

a through hole via extending from at least one of the plurality of polygonal wells through the substrate to another surface of the substrate, wherein the through hole via extends from an out of boundary area of the at least one of the plurality of wells, and wherein the out of boundary area is incapable of being fully covered by the disk shaped device when disk shaped device is deposited in the well.

2. The system of claim 1, wherein the disk shaped device is a diode structure of a post enhanced diode, wherein the post enhanced diode includes a post extending from a surface of the diode structure, and wherein the post is incapable of insertion in the through hole via when the post enhanced diode is deposited in the at least one of the plurality of wells.

3. The system of claim 2, wherein a width of the through hole via is less than a width of the post.

4. The system of claim 2, wherein the through hole via is offset from the post such that when the post enhanced diode is deposited in the well in an inverted orientation the post is incapable of insertion in the through hole via.

5. The system of claim 2, wherein the through hole via is offset from a center location of the bottom of the at least one of the plurality of polygonal wells.

6. The system of claim 2, wherein the post is offset from a center location of the top surface of the diode structure.

7. The system of claim 2, wherein the post is a non-metallic post.

8. The system of claim 2, wherein the post is a conductive post.

9. A fluidic assembly substrate, the substrate comprising:

a plurality of wells each including;

a well opening at a first surface of the substrate, wherein the well opening has a first cross-sectional area;

a through hole via having a via opening with a second cross-sectional area, wherein the through hole via extends from the well to a second surface of the substrate, wherein the second cross-sectional area is less than the first cross-sectional area; and

wherein the through hole via is located below the first cross-sectional area such that a post of a post enhanced diode is incapable of insertion into the through hole via when at least a portion of a diode structure of the post enhanced diode and a portion of the post of the post enhanced diode are deposited in the well.

10. The system of claim 9, wherein a cross-sectional shape of the well parallel to the first surface is a polygon.

11. The substrate of claim 9, wherein the post of the post enhanced diode is substantially centered on the diode structure of the post enhanced diode, and wherein the through hole via is offset from a center of the well.

12. The substrate of claim 9, wherein the through hole via extends from an out of boundary area of the well, wherein the out of boundary area is incapable of being fully covered by the diode structure when the post enhanced diode is deposited in the well with the post directed away from the second surface of the substrate.

13. The substrate of claim 12, wherein the well has a tear drop shape including a circular region and a triangular region, and wherein the out of boundary area includes a portion of the triangular region.

14. The system of claim 9, wherein a third cross-sectional area of the post is greater than the second cross-sectional area of the through hole via.

15. The substrate of claim 9, wherein the well is a first well of the plurality of wells, wherein the first well is joined with a second well of the plurality of wells to make a multi-well structure, and wherein the post enhanced diode may be deposited in a non-inverted orientation in the first well such that it cannot move into the other well without being completely removed from the well.

16. The substrate of claim 15, wherein the through hole via is shared between the first well and the second well, and wherein the through hole via extends below a junction of the first well and the second well.

17. A fluidic assembly system, the system comprising:

a plurality of post enhanced diodes, wherein each of the post enhanced diodes include a diode structure and a post extending from the diode structure;

a substrate including a plurality of wells, wherein each of the wells has;

a sidewall defining an outer perimeter of the well and extending from a first surface of the substrate to a depth within the substrate, and wherein each of the wells is sized to accept a single post enhanced diode;

a through hole via having extending from the well to a second surface of the substrate; and

wherein the through hole via is located below the first cross-sectional area such that a post of a post enhanced diode is incapable of insertion into the through hole via when at least a portion of a diode structure of the post enhanced diode is deposited in the well.

18. The system of claim 17, wherein a cross-sectional shape of the well parallel to the first surface is a polygon.

19. The system of claim 17, wherein the well is a first well of the plurality of wells, wherein the first well is joined with a second well of the plurality of wells to make a multi-well structure, and wherein the post enhanced diode may be deposited in a non-inverted orientation in the first well such that it cannot move into the other well without being completely removed from the well.

20. The system of claim 19, wherein the through hole via is shared between the first well and the second well, and wherein the through hole via extends below a junction of the first well and the second well.

21. The system of claim 17, wherein the through hole via extends from an out of boundary area of the well, wherein the out of boundary area incapable of being fully covered by the diode structure when the post enhanced diode is deposited in the well in a non-inverted orientation.

22. The system of claim 21, wherein the well has a tear drop shape including a circular region and a triangular region, and wherein the out of boundary area includes a portion of the triangular region.