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Strain and pressure sensing device, microphone, method for manufacturing strain and pressure sensing device, and method for manufacturing microphone

  • US 10,246,324 B2
  • Filed: 09/12/2017
  • Issued: 04/02/2019
  • Est. Priority Date: 09/27/2011
  • Status: Active Grant
First Claim
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1. A sensor, comprising:

  • a supporter;

    a beam including a movable portion, the movable portion including a first region having an end fixed to the supporter and a second region extending from the first region, the end of the first region extending in a first direction, the second region of the movable portion having an end opposite the end of the first region and movable in a second direction crossing the first direction; and

    a sensing element fixed to the first region, the second region not overlapping the sensing element in the second direction, the sensing element including a first magnetic layer, a direction of a first magnetization of the first magnetic layer being along the first direction.

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