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Servo control system with position compensation function for driven member

  • US 10,247,301 B2
  • Filed: 11/29/2013
  • Issued: 04/02/2019
  • Est. Priority Date: 11/30/2012
  • Status: Active Grant
First Claim
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1. A servo control system, comprising:

  • a servo motor;

    a table configured to be driven by the servo motor;

    a coupling mechanism coupled with the servo motor and the table, the coupling mechanism configured to use the servo motor as a power source to generate a table drive torque acting on the table at a coupling part of the table and the coupling mechanism; and

    a motor control part configured to control the servo motor, whereinthe motor control part comprisesa position command generating part configured to generate a position command value of the table,a force estimating part configured to estimate the table drive torque acting on the table at the coupling part,a compensating part configured to compensate the position command value generated by the position command generating part based on the table drive torque estimated by the force estimating part,a control signal output part configured to output a control signal to the servo motor based on a position command value compensated by the compensating part,a disturbance torque estimating part configured to estimate a total disturbance torque occurring due to a disturbance acting on the servo motor, the coupling mechanism, and the table,an acceleration/deceleration torque calculating part configured tocalculate angular acceleration of the servo motor based on an angular position of the servo motor or a detected value of a rotational speed of the servo motor, andcalculate an acceleration/deceleration torque required for acceleration or deceleration of the table based on the calculated angular acceleration, anda disturbance torque calculating part configured to calculate a disturbance torque occurring due to a disturbance acting on the servo motor and the coupling mechanism based on the detected value of the rotational speed of the servo motor,whereinthe force estimating part is configured to estimate the table drive torque by subtracting the disturbance torque calculated by the disturbance torque calculating part from a sum ofthe total disturbance torque estimated by the disturbance torque estimating part, andthe acceleration/deceleration torque calculated by the acceleration/deceleration torque calculating part.

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