MEMS device with off-axis shock protection

• US 10,247,753 B2
• Filed: 02/14/2017
• Issued: 04/02/2019
• Est. Priority Date: 02/14/2017
• Status: Active Grant

• Current Assignee: NXP USA, Inc. (NXP Semiconductors NV)
• Original Assignee: NXP USA, Inc. (NXP Semiconductors NV)
• Inventors: Geisberger, Aaron A., Li, Fengyuan
• Primary Examiner(s): Le, Son T
• Assistant Examiner(s): Roberts, Herbert K
• Application Number:
  US15/432,133
• Publication Number:
  US 20180231579A1
• Time in Patent Office: 777 Days
• Field of Search: 7351432
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0808 for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
• CPC Class Codes: G01P 2015/0814 for translational movement of the mass, e.g. shuttle type
• CPC Class Codes: G01P 2015/0831 the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
• CPC Class Codes: G01P 2015/0871 using stopper structures for limiting the travel of the seismic mass

Abstract

A microelectromechanical systems (MEMS) device, such as a single axis accelerometer, includes a movable mass suspended from a substrate. The movable mass has a first portion and a second portion. A first spring system interconnects the first portion of the movable mass with the second portion of the movable mass. A second spring system interconnects the first portion with an anchor system. The first spring system enables movement of the second portion of the movable mass in response to a shock event force imposed on the movable mass in a first direction that is orthogonal to a sense direction, wherein the first spring system inhibits movement of the first portion of the movable mass in the first direction in response to the shock event force. However, the first and second movable masses move together in response to an acceleration force in the sense direction.

Claims

1. A microelectromechanical systems (MEMS) device comprising:

a substrate;

a movable mass suspended from said substrate, said movable mass having a first portion and a second portion; and

a spring system interconnecting said first portion of said movable mass with said second portion of said movable mass, said spring system enabling translational movement of said second portion of said movable mass in response to a first force imposed upon said movable mass in a first direction that is orthogonal to a sense direction, wherein said spring system inhibits movement of said first portion of said movable mass in said first direction in response to said first force, and wherein said first direction is parallel to a surface of said substrate such that said translational movement of said second portion of said movable mass in response to said first force is oriented substantially parallel to said surface of said substrate, said first and second portions of said movable mass are configured to move together in response to a second force imposed upon said movable mass in said sense direction, and said first portion is limited to a single degree-of-freedom motion in said sense direction.

2. The MEMS device of claim 1 wherein said second portion of said movable mass surrounds said first portion of said movable mass.

3. The MEMS device of claim 1 further comprising at least one motion limiting structure laterally displaced away from an outer perimeter of said second portion of said movable mass in said first direction, wherein when said second portion of said movable mass moves in said first direction in response to said first force, said second portion of said movable mass contacts said at least one motion limiting structure.

4. The MEMS device of claim 1 wherein said spring system comprises a plurality of spring elements, each of said spring elements enabling motion of said second portion of said movable mass in said first direction and said each of said spring elements being rigid in said sense direction.

5. The MEMS device of claim 1 wherein said spring system comprises a plurality of straight beam flexures interconnecting said first portion of said movable mass with said second portion of said movable mass.

6. The MEMS device of claim 1 wherein said spring system is a first spring system, and said MEMS device further comprises:

an anchor system coupled to said substrate; and

a second spring system interconnecting said first portion of said movable mass with said anchor system, said second spring system enabling said first and second portions of said movable mass to move together in response to said second force imposed upon said movable mass in said sense direction.

7. The MEMS device of claim 6 wherein said first spring system isolates said anchor system and said second spring system from movement in said first direction in response to said first force.

8. The MEMS device of claim 6 wherein said sense direction is substantially perpendicular to a surface of said substrate, and said second spring system comprises a torsion spring for enabling movement of said first and second portions of said movable mass about a rotational axis that is substantially parallel to said surface of said substrate in response to said second force imposed upon said movable mass in said sense direction.

9. The MEMS device of claim 8 further comprising sense electrodes formed on said surface of said substrate and underlying said second portion of said movable mass.

10. The MEMS device of claim 6 wherein said sense direction is substantially parallel to a surface of said substrate, and said second spring system comprises spring elements for enabling translational motion of said first and second portions of said movable mass in response to said second force imposed upon said movable mass in said sense direction.

11. The MEMS device of claim 10 wherein:

said first portion of said movable mass includes a plurality of movable electrodes; and

said MEMS device further comprises fixed electrodes formed on said substrate in proximity to said movable electrodes of said first portion of said movable mass.

12. A microelectromechanical systems (MEMS) device comprising:

a substrate;

a movable mass suspended from said substrate, said movable mass having a first portion and a second portion, said second portion surrounding said first portion;

at least one motion limiting structure laterally displaced away from an outer perimeter of said second portion of said movable mass; and

a spring system interconnecting said first portion of said movable mass with said second portion of said movable mass, said spring system enabling translational movement of said second portion of said movable mass in response to a first force imposed upon said movable mass in a first direction that is orthogonal to a sense direction, wherein when said second portion of said movable mass moves in said first direction in response to said first force, said second portion of said movable mass contacts said at least one motion limiting structure, and wherein said spring system inhibits movement of said first portion of said movable mass in said first direction in response to said first force, and wherein said first direction is parallel to a surface of said substrate such that said translational movement of said second portion of said movable mass in response to said first force is oriented substantially parallel to said surface of said substrate, said first and second portions of said movable mass are configured to move together in response to a second force imposed upon said movable mass in said sense direction, and said first portion is limited to a single degree-of-freedom motion in said sense direction.

13. The MEMS device of claim 12 wherein said movement of said second portion of said movable mass in response to said first force is substantially parallel to a surface of said substrate.

14. The MEMS device of claim 12 wherein said spring system comprises a plurality of straight beam flexures interconnecting said first portion of said movable mass with said second portion of said movable mass.

15. The MEMS device of claim 12 wherein said spring system is a first spring system, and said MEMS device further comprises:

an anchor system coupled to said substrate; and

a second spring system interconnecting said first portion of said movable mass with said anchor system, said second spring system enabling said first and second portions of said movable mass to move together in response to said second force imposed upon said movable mass in said sense direction.

16. A microelectromechanical systems (MEMS) device comprising:

a substrate;

a movable mass suspended from said substrate, said movable mass having a first portion and a second portion;

a first spring system interconnecting said first portion of said movable mass with said second portion of said movable mass, said first spring system including a plurality of spring elements, each of said spring elements enabling translational movement of said second portion of said movable mass in response to a first force imposed upon said movable mass in a first direction that is orthogonal to a sense direction, wherein said first direction is parallel to a surface of said substrate such that said translational movement of said second portion of said movable mass in response to said first force is oriented substantially parallel to said surface of said substrate;

an anchor system coupled to said substrate; and

a second spring system interconnecting said first portion of said movable mass with said anchor system to suspend said movable mass from said substrate, said second spring system enabling said first and second portions of said movable mass to move together in response to a second force imposed upon said movable mass in said sense direction, wherein said each of said spring elements of said first spring system are rigid in said sense direction such that said first spring system inhibits movement of said first portion of said movable mass in said first direction in response to said first force such that said first portion is limited to a single degree-of-freedom motion in said sense direction.

17. The MEMS device of claim 16 wherein said first spring system isolates said anchor system and said second spring system from movement in said first direction in response to said first force.

18. The MEMS device of claim 16 wherein:

said sense direction is substantially perpendicular to a surface of said substrate;

said second spring system comprises a torsion spring for enabling motion of said first and second portions of said movable mass about a rotational axis that is substantially parallel to said surface of said substrate in response to said second force imposed upon said movable mass in said sense direction; and

said MEMS device further comprises sense electrodes formed on said surface of said substrate and underlying said second portion of said movable mass.

19. The MEMS device of claim 16 wherein:

said sense direction is substantially parallel to a surface of said substrate;

said second spring system comprises spring elements for enabling translational motion of said first and second portions of said movable mass in response to said second force imposed upon said movable mass in said sense direction; and

said MEMS device further comprises fixed electrodes formed on said substrate in proximity to movable electrodes of said first portion of said movable mass.