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Laser-induced ultrasonic wave apparatus and method

  • US 10,251,559 B2
  • Filed: 05/03/2013
  • Issued: 04/09/2019
  • Est. Priority Date: 05/03/2012
  • Status: Active Grant
First Claim
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1. A laser-induced ultrasonic wave apparatus, the apparatus comprising:

  • a laser source configured to irradiate a target object and a thermoelastic material with a laser beam;

    the thermoelastic material configured to be spatially apart from the target object, configured to generate a first acoustic wave based upon irradiation of the thermoelastic material by the laser beam, and configured to transmit the first acoustic wave to the target object;

    a transducer configured to transduce acoustic waves into electric signals, the transducer including at least one piezoelectric micromachined ultrasonic transducer (pMUT), capacitive micromachined ultrasonic transducer (cMUT), or magnetic micromachined ultrasonic transducer (mMUT); and

    a substrate between the thermoelastic material and the transducer in a single probe such that the single probe includes the thermoelastic material, the substrate, and the transducer,wherein the transducer is further configured toreceive an echo acoustic wave of the first acoustic wave, as reflected from the target object through the substrate, and transduce the echo acoustic wave into first electric signals, andreceive a second acoustic wave generated in the target object by irradiation of the target object by the laser beam from the target object through the substrate and transduce the second acoustic wave into second electric signals.

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