Porous particles and methods of making thereof
First Claim
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1. A method of making porous particles comprising:
- providing a substrate having a surface;
forming a first porous layer in the substrate by electrochemical etching using a first current density;
patterning one or more particles on the substrate;
forming in the substrate a second porous layer having a porosity larger than that of the first porous layer by electrochemical etching using a second current density higher than the first current density; and
releasing the patterned one or more particles from the substrate, wherein the releasing comprises breaking the second porous layer, wherein the released one or more particles contain at least a portion of the first porous layer, and wherein a cross section of an individual particle of the one or more particles has a predetermined regular shape.
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Abstract
Provided is a particle that includes a first porous region and a second porous region that differs from the first porous region. Also provided is a particle that has a wet etched porous region and that does have a nucleation layer associated with wet etching. Methods of making porous particles are also provided.
9 Citations
24 Claims
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1. A method of making porous particles comprising:
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providing a substrate having a surface; forming a first porous layer in the substrate by electrochemical etching using a first current density; patterning one or more particles on the substrate; forming in the substrate a second porous layer having a porosity larger than that of the first porous layer by electrochemical etching using a second current density higher than the first current density; and releasing the patterned one or more particles from the substrate, wherein the releasing comprises breaking the second porous layer, wherein the released one or more particles contain at least a portion of the first porous layer, and wherein a cross section of an individual particle of the one or more particles has a predetermined regular shape. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A method of making porous particles comprising:
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providing a substrate having a surface; forming a first porous layer in the substrate by electrochemical etching using a first current density; patterning one or more particles on the substrate, wherein the first porous layer is formed before the patterning; forming in the substrate a second porous layer having a porosity larger than that of the first porous layer by electrochemical etching using a second current density higher than the first current density; and releasing the patterned one or more particles from the substrate, wherein the releasing comprises breaking the second porous layer, and wherein the released one or more particles contain at least a portion of the first porous layer.
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23. A method of making porous particles comprising:
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providing a substrate having a surface; forming a first porous layer in the substrate by electrochemical etching using a first current density, wherein said forming the first porous layer comprises forming pores of a predetermined profile in said first porous layer; patterning one or more particles on the substrate; forming in the substrate a second porous layer having a porosity larger than that of the first porous layer by electrochemical etching using a second current density higher than the first current density; and releasing the patterned one or more particles from the substrate, wherein the releasing comprises breaking the second porous layer, and wherein the released one or more particles contain at least a portion of the first porous layer.
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24. A method of making porous particles comprising:
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providing a substrate having a surface; forming a first porous layer in the substrate by electrochemical etching using a first current density; patterning one or more particles on the substrate; forming in the substrate a second porous layer having a porosity larger than that of the first porous layer by electrochemical etching using a second current density higher than the first current density; and releasing the patterned one or more particles from the substrate, wherein the releasing comprises breaking the second porous layer, wherein the released one or more particles contain at least a portion of the first porous layer, and wherein a pore size in the first porous layer is no more than 100 nm.
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Specification