Biosensors for biological or chemical analysis and methods of manufacturing the same

• US 10,254,225 B2
• Filed: 12/09/2014
• Issued: 04/09/2019
• Est. Priority Date: 12/10/2013
• Status: Active Grant

• Current Assignee: Illumina Incorporated
• Original Assignee: Illumina Incorporated
• Inventors: Zhong, Cheng Frank, Finkelstein, Hod, Boyanov, Boyan, Dehlinger, Dietrich, Segale, Darren
• Primary Examiner(s): Turk, Neil N
• Application Number:
  US15/175,489
• Publication Number:
  US 20160356715A1
• Time in Patent Office: 1,582 Days
• Field of Search: None
• CPC Class Codes: B01L 3/502707 characterised by the manufacture of the container or its components by shaping or joining plastic parts B29C59/00, B29C65/00; by laminating B32B37/00; manufacture of microstructural devices in general B81C
• CPC Class Codes: B01L 3/502715 characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces
• CPC Class Codes: C12Q 1/6874 involving nucleic acid arrays, e.g. sequencing by hybridisation
• CPC Class Codes: G01N 2021/6441 with two or more labels
• CPC Class Codes: G01N 2021/6482 Sample cells, cuvettes
• CPC Class Codes: G01N 21/05 Flow-through cuvettes G01N21/09 takes precedence; handling fluid samples G01N1/10
• CPC Class Codes: G01N 21/6428 Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes" in vivo A61B5/00; immunoassay G01N33/53
• CPC Class Codes: G01N 21/645 Specially adapted constructive features of fluorimeters
• CPC Class Codes: G01N 21/6452 Individual samples arranged in a regular 2D-array, e.g. multiwell plates
• CPC Class Codes: G01N 21/6454 using an integrated detector array
• CPC Class Codes: G01N 2201/061 Sources
• CPC Class Codes: G01N 2201/0642 Light traps; baffles
• CPC Class Codes: G01N 27/4145 specially adapted for biomolecules, e.g. gate electrode with immobilised receptors
• CPC Class Codes: G01N 33/54373 involving physiochemical end-point determination, e.g. wave-guides, FETS, gratings
• CPC Class Codes: H01L 27/00 Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate details thereof H01L23/00, H01L29/00 - H10K10/00; assemblies consisting of a plurality of individual solid state devices H01L25/00
• CPC Class Codes: H01L 27/088 the components being field-effect transistors with insulated gate
• CPC Class Codes: H01L 27/14623 Optical shielding

Abstract

Biosensor including a device base having a sensor array of light sensors and a guide array of light guides. The light guides have input regions that are configured to receive excitation light and light emissions generated by biological or chemical substances. The light guides extend into the device base toward corresponding light sensors and have a filter material. The device base includes device circuitry electrically coupled to the light sensors and configured to transmit data signals. The biosensor also includes a shield layer having apertures that are positioned relative to the input regions of corresponding light guides such that the light emissions propagate through the apertures into the corresponding input regions. The shield layer extends between adjacent apertures and is configured to block the excitation light and the light emissions incident on the shield layer between the adjacent apertures.

Claims

1. A biosensor comprising:

a flow cell; and

a detection device having the flow cell coupled thereto, the flow cell and the detection device forming a flow channel that is configured to have biological or chemical substances therein that generate light emissions in response to an excitation light, the detection device including;

a device base having a sensor array of light sensors and a guide array of light guides, the light guides having input regions that are configured to receive the excitation light and the light emissions from the flow channel, the light guides extending into the device base from the input regions toward corresponding light sensors and having a filter material that is configured to filter the excitation light and permit the light emissions to propagate toward the corresponding light sensors, the device base including device circuitry electrically coupled to the light sensors and configured to transmit data signals based on photons detected by the light sensors; and

a shield layer extending between the flow channel and the device base, the shield layer having apertures that are positioned relative to the input regions of corresponding light guides such that the light emissions propagate through the apertures into the corresponding input regions, the shield layer extending between adjacent apertures and configured to block the excitation light and the light emissions incident on the shield layer between the adjacent apertures.

2. The biosensor of claim 1, wherein the input regions of the light guides are located within the corresponding apertures of the shield layer or are located a depth into the device base.

3. The biosensor of claim 1, further comprising a passivation layer that extends along the shield layer such that the shield layer is between the passivation layer and the device base, the passivation layer extending across the apertures.

4. The biosensor of claim 3, wherein the filter material of the light guides is an organic filter material, the passivation layer extending directly along the input regions of the light guides and isolating the organic filter material from the shield layer.

5. The biosensor of claim 3, wherein the passivation layer extends directly along the input regions of the light guides at corresponding material interfaces, the material interfaces being located within the corresponding apertures of the shield layer or located a depth into the device base.

6. The biosensor of claim 3, wherein the passivation layer extends into the apertures and forms an array of reaction recesses, the reaction recesses extending toward or being located within corresponding apertures.

7. The biosensor of claim 6, wherein the reaction recesses have corresponding base surfaces, the base surfaces being located within the aperture or located a depth into the device base.

8. The biosensor of claim 1, wherein the device base includes peripheral crosstalk shields, each of the crosstalk shields surrounding a respective one of the corresponding light guides, the crosstalk shields configured to reduce optical crosstalk between adjacent light sensors.

10. The biosensor of claim 3, wherein the passivation layer includes tantalum pentoxide (Ta₂O₅).

11. The biosensor of claim 10, wherein the passivation layer includes stacked multiple sub-layers in which at least one of the sub-layers includes the tantalum pentoxide (Ta₂O₅).

12. The biosensor of claim 11, wherein the sub-layers include two tantalum pentoxide (Ta₂O₅) layers with a low-temperature film therebetween.

13. The biosensor of claim 11, wherein the sub-layers include two plasma vapor deposition (PVD) tantalum pentoxide layers with a plasma enhanced chemical vapor deposition (PECVD) silicon nitride film therebetween.

9. A method of manufacturing a biosensor, the method comprising:

providing a device base having a sensor array of light sensors and device circuitry that is electrically coupled to the light sensors and configured to transmit data signals based on photons detected by the light sensors, the device base having an outer surface;

applying a shield layer to the outer surface of the device base;

forming apertures through the shield layer;

forming guide cavities that extend from corresponding apertures toward a corresponding light sensor of the sensor array;

depositing filter material within the guide cavities, wherein a portion of the filter material extends along the shield layer;

curing the filter material;

removing the filter material from the shield layer, the filter material within the guide cavities forming light guides; and

applying a passivation layer to the shield layer such that the passivation layer extends directly along the shield layer and across the apertures.