Inspection apparatus and inspection system
First Claim
1. An inspection apparatus configured to inspect a subject, the apparatus comprising:
- a transmitting flat antenna comprising a first substrate, a first superconducting antenna pattern on the first substrate, and a second superconducting antenna pattern on the first substrate, and configured to transmit a microwave via the first superconducting antenna pattern and the second superconducting antenna pattern, wherein a first distance between the first superconducting antenna pattern and the second superconducting antenna pattern is less than λ
/10, wherein λ
is a resonance frequency of each of the first and second superconducting antenna patterns; and
a receiving flat antenna comprising a second substrate, a third superconducting antenna pattern on the second substrate, and a fourth superconducting antenna pattern on the second substrate, and configured to receive at least one of a first microwave penetrating the subject and having a delayed phase, and a second microwave diffracting the subject, via the third superconducting antenna pattern and the fourth superconducting antenna pattern, wherein a second distance between the third superconducting antenna pattern and the fourth superconducting antenna pattern is less than λ
/10,wherein the transmitting flat antenna and the receiving flat antenna face each other, andthe subject is placed between the transmitting flat antenna and the receiving flat antenna.
1 Assignment
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Accused Products
Abstract
An inspection apparatus of an embodiment includes a transmitting antenna device connected to a transmitting unit including a transmitting device configured to transmit a microwave, and a receiving antenna device connected to a receiving unit including a receiving device. Each of the transmitting antenna device and the receiving antenna device faces a subject to be inspected. The receiving antenna device receives at least one of a microwave transmitted from the transmitting antenna device and penetrating the subject to be inspected, a microwave of which phase has been delayed, and a microwave diffracted in the subject to be inspected. The receiving unit is a directional antenna.
21 Citations
29 Claims
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1. An inspection apparatus configured to inspect a subject, the apparatus comprising:
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a transmitting flat antenna comprising a first substrate, a first superconducting antenna pattern on the first substrate, and a second superconducting antenna pattern on the first substrate, and configured to transmit a microwave via the first superconducting antenna pattern and the second superconducting antenna pattern, wherein a first distance between the first superconducting antenna pattern and the second superconducting antenna pattern is less than λ
/10, wherein λ
is a resonance frequency of each of the first and second superconducting antenna patterns; anda receiving flat antenna comprising a second substrate, a third superconducting antenna pattern on the second substrate, and a fourth superconducting antenna pattern on the second substrate, and configured to receive at least one of a first microwave penetrating the subject and having a delayed phase, and a second microwave diffracting the subject, via the third superconducting antenna pattern and the fourth superconducting antenna pattern, wherein a second distance between the third superconducting antenna pattern and the fourth superconducting antenna pattern is less than λ
/10,wherein the transmitting flat antenna and the receiving flat antenna face each other, and the subject is placed between the transmitting flat antenna and the receiving flat antenna. - View Dependent Claims (2, 3, 4, 5, 6, 11, 13, 15, 17, 19, 21, 23, 25, 28)
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7. An inspection system configured to inspect a subject, the system, comprising:
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a transmitting flat antenna comprising a first substrate, a first superconducting antenna pattern on the first substrate, and a second superconducting antenna pattern on the first substrate, and transmitting a microwave via the first superconducting antenna pattern and the second superconducting antenna pattern, wherein a first distance between the first superconducting antenna pattern and the second superconducting antenna pattern is less than λ
/10, wherein λ
is a resonance frequency of each of the first and second superconducting antenna patterns, to the subject;a receiving flat antenna comprising a second substrate, a third superconducting antenna pattern on the second substrate, and a fourth superconducting antenna pattern on the second substrate, and receiving at least one of a first microwave penetrating the subject and having a delayed phase, and a second microwave diffracting the subject via the third superconducting antenna pattern and the fourth superconducting antenna pattern, wherein a second distance between the third superconducting antenna pattern and the fourth superconducting antenna pattern is less than λ
/10; anda detecting unit detecting a foreign material in the subject by analyzing a received signal, wherein the receiving flat antenna receives two-dimensional information of the subject; and the subject is placed between the transmitting flat antenna and the receiving flat antenna. - View Dependent Claims (8, 9, 10, 12, 14, 16, 18, 20, 22, 24, 26, 27, 29)
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Specification