Nano-gap electrode pair and method of manufacturing same

• US 10,261,066 B2
• Filed: 04/13/2016
• Issued: 04/16/2019
• Est. Priority Date: 10/16/2013
• Status: Active Grant

• Current Assignee: Quantum Biosystems Inc.
• Original Assignee: Quantum Biosystems Inc.
• Inventors: Ikeda, Shuji, Oldham, Mark, Nordman, Eric S.
• Primary Examiner(s): Kaur, Gurpreet
• Application Number:
  US15/098,147
• Publication Number:
  US 20160320364A1
• Time in Patent Office: 1,098 Days
• CPC Class Codes: C23C 16/45525 Atomic layer deposition [ALD]
• CPC Class Codes: G01N 27/3278 involving nanosized elements, e.g. nanogaps or nanoparticles nanopores G01N33/48721; magnetic beads G01N27/745
• CPC Class Codes: G01N 27/44791 Microapparatus sample containers with integrated microfluidic structures B01L3/5027
• CPC Class Codes: G01N 33/48721 Investigating individual macromolecules, e.g. by translocation through nanopores Coulter counters in general G01N15/12; fabrication methods for nanoscale apertures B81B1/00; sequencing of nucleic acids C12Q1/68

Abstract

A system for detecting a biomolecule comprises a nano-gap electrode device including a first electrode and a second electrode adjacent to the first electrode. The first electrode can be separated from the second electrode by a nano-gap that is dimensioned to permit the biomolecule to flow through the nano-gap. The nano-gap can have at least a first gap region and a second gap region. The second gap region can be oriented at an angle that is greater than zero degrees with respect to a plane having the first gap region. The system can further include an electrical circuit coupled to the nano-gap electrode device. The electrical circuit can receive electrical signals from the first electrode and the second electrode upon the flow of the biomolecule through the nano-gap.

Claims

1. A system for detecting a biomolecule, comprising:

a nano-gap electrode device including a first electrode adjacent to a substrate and a second electrode adjacent to said first electrode wherein said first electrode is separated from said second, electrode by a nano-gap that is dimensioned to permit said biomolecule to flow through said nano-gap, wherein said nano-gap has at least a first gap region and a second gap region, wherein said second gap region is oriented at an angle that is greater than zero degrees with respect to a plane having said first gap region, wherein said first electrode comprises a first portion and a second portion that is adjacent to said first portion, wherein said first and second portions are adjacent to said substrate, wherein said first portion has a greater thickness than said second portion, wherein said first portion has a surface that partially defines said second gap region, and wherein said second portion has a surface that partially defines said first gap region; and

an electrical circuit coupled to said nano-gap electrode device, wherein said electrical circuit receives electrical signals from said first electrode and said second electrode upon the flow of said biomolecule through said nano-gap.

2. The system of claim 1, wherein said second electrode is adjacent to an insulating layer that is in contact with said first electrode.

3. The system of claim 1, wherein a portion of said first electrode or said second electrode has a single atom tip.

4. The system of claim 1, wherein a terminal end of said second gap region is coupled to said first gap region.

5. The system of claim 1, further comprising at least one channel in fluid communication with said nano-gap electrode device and configured to direct said biomolecule to said nano-gap.

6. The system of claim 5, wherein said channel is integrated with a microfluidic structure.

7. The system of claim 1, wherein said electrical circuit is part of a computer processor that is programmed to detect said biomolecule or portion thereof from said electrical signals.

8. The system of claim 1, wherein said nano-gap electrode device is part of an array of nano-gap electrode devices.

9. The system of claim 8, wherein said nano-gap electrode device is independently addressable with respect to other nano-gap electrode devices of said array.

10. The system of claim 1, wherein said nano-gap has a third gap region, a terminal end of which is coupled to said first gap region.

11. The system of claim 1, wherein said second gap region is oriented at an angle that is greater than about 25°

with respect to said plane having said first gap region.

12. The system of claim 1, wherein said second gap region is oriented at an angle that is greater than about 45°

with respect to said plane having said first gap region.

13. The system of claim 1, wherein said second gap region is oriented at an angle that is about 90°

with respect to said plane having said first gap region.

14. The system of claim 1, wherein said nano-gap has a width less than a diameter of said biomolecule or a subunit thereof.

15. The system of claim 1, wherein said electrical signals comprise current signals.

16. The system of claim 15, wherein said current signals comprise tunneling current.

17. The system of claim 1, wherein said second electrode is disposed above at least a part of said second portion of said first electrode.

18. The system of claim 1, wherein said second electrode comprises at least a first portion and a second portion adjacent to said first portion, wherein said first portion has a greater thickness than said second portion.

19. The system of claim 18, wherein said first portion of said first electrode has a greater thickness than said first portion of said second electrode.

20. The system of claim 1, wherein said first gap region is sandwiched between said first electrode and said second electrode.