Anchor tracking for MEMS accelerometers

• US 10,261,105 B2
• Filed: 02/07/2018
• Issued: 04/16/2019
• Est. Priority Date: 02/10/2017
• Status: Active Grant

• Current Assignee: Analog Devices, Inc.
• Original Assignee: Analog Devices, Inc.
• Inventors: Clark, William A.
• Primary Examiner(s): Patel, Harshad R
• Assistant Examiner(s): Plumb, Nigel H
• Application Number:
  US15/890,835
• Publication Number:
  US 20180231580A1
• Time in Patent Office: 433 Days
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 2203/0307 Anchors
• CPC Class Codes: B81B 2203/04 Electrodes
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: G01P 2015/0817 for pivoting movement of the mass, e.g. in-plane pendulum
• CPC Class Codes: G01P 2015/084 the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass

Abstract

A microelectromechanical system (MEMS) accelerometer is described. The MEMS accelerometer is arranged to limit distortions in the detection signal caused by displacement of the anchor(s) connecting the MEMS accelerometer to the underlying substrate. The MEMS accelerometer may include masses arranged to move in opposite directions in response to an acceleration of the MEMS accelerometer, and to move in the same direction in response to displacement of the anchor(s). The masses may, for example, be hingedly coupled to a beam in a teeter-totter configuration. Motion of the masses in response to acceleration and anchor displacement may be detected using capacitive sensors.

Claims

1. A micro electro-mechanical system (MEMS) accelerometer, comprising:

at least one anchor coupled to a substrate;

a proof mass connected to the at least one anchor; and

a counter-balance mass connected to the proof mass and to the at least one anchor,

wherein, in response to an acceleration of the MEMS accelerometer in a first direction, the proof mass is configured to move in the first direction and the counter-balance mass is configured to move in a second direction opposite from the first direction, and

wherein, in response to displacement of the at least one anchor in the first direction, the proof mass and the counter-balance mass are configured to move in the first direction.

2. The MEMS accelerometer of claim 1, further comprising:

a sense capacitor comprising a fixed electrode and a finger having a free end and a fixed end connected to the proof mass, the sense capacitor being configured to sense motion of the proof mass.

3. The MEMS accelerometer of claim 1, further comprising:

a sense capacitor comprising a fixed electrode and a finger having a free end and a fixed end connected to the counter-balance mass, the sense capacitor being configured to sense motion of the counter-balance mass.

4. The MEMS accelerometer of claim 1, wherein the proof mass is heavier than the counter-balance mass.

5. The MEMS accelerometer of claim 1, wherein the proof mass is connected to the at least one anchor via one or more hinges.

6. The MEMS accelerometer of claim 1, wherein the proof mass is suspended above the substrate.

7. The MEMS accelerometer of claim 1, further comprising a beam, wherein the proof mass and the counter-balance mass are hingedly coupled to the beam.

8. The MEMS accelerometer of claim 1, wherein the first and second directions are in-plane with respect to the proof mass.

9. A micro electro-mechanical system (MEMS) accelerometer, comprising:

at least one anchor coupled to a substrate;

a beam movably coupled to the at least one anchor;

a proof mass coupled to the beam and a counter-balance mass coupled to the beam; and

a first electrode and a second electrode, the first and second electrodes being coupled to the substrate,

wherein the proof mass forms a first capacitive sensor with the first electrode and the counter-balance mass forms a second capacitive sensor with the second electrode.

10. The MEMS accelerometer of claim 9, wherein the first and second electrodes are formed from a common mass.

11. The MEMS accelerometer of claim 9, wherein the first and second electrodes are formed from separate masses.

12. The MEMS accelerometer of claim 9, wherein the beam is coupled to the at least one anchor via a first hinge, the proof mass is coupled to the beam via a second hinge and the counter-balance mass is coupled to the beam via a third hinge,

wherein the beam extends along a first direction, and

wherein the first hinge is positioned between the second hinge and the third hinge in the first direction.

13. The MEMS accelerometer of claim 9, wherein, in response to an acceleration of the MEMS accelerometer in a first direction, the proof mass is configured to move in the first direction and the counter-balance mass is configured to move in a second direction opposite from the first direction.

14. The MEMS accelerometer of claim 13, wherein, in response to displacement of the at least one anchor in the first direction, the proof mass and the counter-balance mass are configured to move in the first direction.

15. The MEMS accelerometer of claim 9, wherein the proof mass is heavier than the counter-balance mass.

16. The MEMS accelerometer of claim 9, wherein the proof mass, the beam and the counter-balance mass are suspended above the substrate.

17. A method for detecting acceleration using a micro electro-mechanical system (MEMS) accelerometer, the method comprising:

sensing motion of a proof mass in a first direction in response to acceleration of the MEMS accelerometer to obtain a first detection signal, the proof mass being coupled to at least one anchor;

sensing motion of a counter-balance mass in a direction that is opposite from the first direction in response to the acceleration of the MEMS accelerometer to obtain a second detection signal, the counter-balance mass being coupled to the at least one anchor;

sensing motion of the proof mass in a second direction in response to displacement of the at least one anchor to obtain a third detection signal;

sensing motion of the counter-balance mass in the second direction in response to the displacement of the at least one anchor to obtain a fourth detection signal; and

detecting the acceleration of the MEMS accelerometer using the first, second, third and fourth detection signals.

18. The method of claim 17, wherein the second direction is parallel to the first direction.

19. The method of claim 17, wherein:

sensing motion of a proof mass in a first direction in response to acceleration of the MEMS accelerometer comprises sensing a variation in a capacitance of a first capacitive sensor;

sensing motion of a counter-balance mass in a direction opposite the first direction in response to the acceleration of the MEMS accelerometer comprises sensing a variation in a capacitance of a second capacitive sensor;

sensing motion of the proof mass in a second direction in response to displacement of the at least one anchor comprises sensing a variation in a capacitance of a third capacitive sensor; and

sensing motion of the counter-balance mass in the second direction in response to the displacement of the at least one anchor comprises sensing the variation in the capacitance of the first capacitive sensor.

20. The method of claim 17, wherein the first and second directions are in-plane with respect to the proof mass.