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Anchor tracking for MEMS accelerometers

  • US 10,261,105 B2
  • Filed: 02/07/2018
  • Issued: 04/16/2019
  • Est. Priority Date: 02/10/2017
  • Status: Active Grant
First Claim
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1. A micro electro-mechanical system (MEMS) accelerometer, comprising:

  • at least one anchor coupled to a substrate;

    a proof mass connected to the at least one anchor; and

    a counter-balance mass connected to the proof mass and to the at least one anchor,wherein, in response to an acceleration of the MEMS accelerometer in a first direction, the proof mass is configured to move in the first direction and the counter-balance mass is configured to move in a second direction opposite from the first direction, andwherein, in response to displacement of the at least one anchor in the first direction, the proof mass and the counter-balance mass are configured to move in the first direction.

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