System and method for predicting remaining useful life of component of equipment
First Claim
1. A system for predicting a remaining useful life (RUL) of a component of an equipment, comprising:
- a data acquisition (DAQ) unit for obtaining a real time sensing record;
a feature capturing unit for obtaining an estimation feature according to the real time sensing record, and obtaining a plurality of training features according to a plurality of history sensing records;
a mapping function generating unit for obtaining a mapping function according to the training features, wherein the mapping function includes a relationship between the training features and at least one predicting value;
a similarity analyzing unit for obtaining k similar features which are similar to the estimation feature according to the training features; and
a RUL calculating unit for obtaining the at least one predicting value via the mapping function according to the k similar features and calculating an estimation RUL according to the at least one predicting value;
wherein the equipment is a semiconductor equipment.
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Abstract
A system and a method for predicting a remaining useful life (RUL) of a component of an equipment are provided. The system for predicting the RUL of the component of the equipment includes a data acquisition unit, a feature capturing unit, a mapping function generating unit, a similarity analyzing unit and a RUL calculating unit. The feature capturing unit obtains an estimation feature according to a real time sensing record, and obtains a plurality of training features according to a set of history sensing records. The similarity analyzing unit obtains k similar features which are similar to the estimation feature according to the training features. The RUL calculating unit obtains at least one of k predicting information via a mapping function according to the k similar features and calculates an estimation RUL according to at least one predicting value.
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Citations
21 Claims
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1. A system for predicting a remaining useful life (RUL) of a component of an equipment, comprising:
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a data acquisition (DAQ) unit for obtaining a real time sensing record; a feature capturing unit for obtaining an estimation feature according to the real time sensing record, and obtaining a plurality of training features according to a plurality of history sensing records; a mapping function generating unit for obtaining a mapping function according to the training features, wherein the mapping function includes a relationship between the training features and at least one predicting value; a similarity analyzing unit for obtaining k similar features which are similar to the estimation feature according to the training features; and a RUL calculating unit for obtaining the at least one predicting value via the mapping function according to the k similar features and calculating an estimation RUL according to the at least one predicting value; wherein the equipment is a semiconductor equipment. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for predicting a remaining useful life (RUL) of a component of an equipment, comprising:
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obtaining a real time sensing record; obtaining an estimation feature according to the real time sensing record, and obtaining a plurality of training features according to a plurality of history sensing records; obtaining a mapping function according to the training features, wherein the mapping function includes a relationship between the training features and at least one predicting value; obtaining k similar features which are similar to the estimation feature according to the training features; and obtaining the at least one predicting value via the mapping function according to the k similar features and calculating an estimation RUL according to the at least one predicting value. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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Specification