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ALD metal coatings for high Q MEMS structures

  • US 10,266,398 B1
  • Filed: 11/26/2014
  • Issued: 04/23/2019
  • Est. Priority Date: 07/25/2007
  • Status: Active Grant
First Claim
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1. A method for fabricating a microelectromechanical system (MEMS) resonator, comprising:

  • providing a dielectric substrate having a resonator defined therein; and

    depositing a bilayer conductive coating on the dielectric substrate, the depositing of the bilayer conductive coating including(i) depositing a dielectric film on the dielectric substrate by Atomic Layer Deposition, and(ii) depositing a metal film on the deposited dielectric film by Atomic Layer Deposition, andwherein the bilayer conductive coating electrically couples the resonator to electronics.

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