Method for inspecting crystal unit by analyzing frequency characteristics of impedance

• US 10,267,755 B2
• Filed: 12/16/2015
• Issued: 04/23/2019
• Est. Priority Date: 02/02/2015
• Status: Active Grant

• Current Assignee: Fujitsu Limited
• Original Assignee: Fujitsu Limited
• Inventors: Kishi, Masakazu, Kubota, Hajime, Itoh, Masayuki
• Primary Examiner(s): Larkin, Daniel S
• Assistant Examiner(s): Singer, David L
• Application Number:
  US14/970,651
• Publication Number:
  US 20160223391A1
• Time in Patent Office: 1,224 Days
• Field of Search: 324 7649, 324727, 324619, 331 44, 331163, 331158-162, 331164, 73588, 73582, 73DIG 4, 73576, 73574, 29 2535, 29593
• CPC Class Codes: G01H 15/00 Measuring mechanical or acoustic impedance
• CPC Class Codes: G01N 27/02 by investigating impedance
• CPC Class Codes: G01N 27/028 Circuits therefor measuring impedance per se G01R27/02
• CPC Class Codes: G01R 23/02 Arrangements for measuring frequency, e.g. pulse repetition rate; Arrangements for measuring period of current or voltage
• CPC Class Codes: G01R 27/16 Measuring impedance of element or network through which a current is passing from another source, e.g. cable, power line
• CPC Class Codes: G01R 29/22 Measuring piezoelectric properties
• CPC Class Codes: G01R 31/2824 testing of oscillators or resonators
• CPC Class Codes: H03B 5/323 the resonator having more than two terminals H03B5/326 takes precedence
• CPC Class Codes: H03B 5/36 active element in amplifier being semiconductor device H03B5/323, H03B5/326 , H03B5/38 take precedence
• CPC Class Codes: H03H 9/1021 the BAW device being of the cantilever type

Abstract

A method for inspecting a crystal unit, the method includes: generating a sub-vibration in a crystal blank of the crystal unit by applying an input signal to a plurality of electrodes formed on the crystal blank; obtaining frequency characteristics of impedance between the plurality of electrodes from an output signal of the plurality of electrodes; and comparing the frequency characteristics obtained with reference frequency characteristics indicating quality of the crystal unit.

Claims

1. A method of inspecting comprising:

providing a crystal oscillator including a crystal blank, a main-vibration electrode, and a housing that houses the crystal blank and the main-vibration electrode;

providing a plurality of sub-vibration electrodes on the crystal blank along with the main-vibration electrode of the crystal oscillator including an oscillation circuit;

generating a sub-vibration in the crystal blank of the crystal oscillator by generating an alternating electric field between the plurality of sub-vibration electrodes formed on the crystal blank using an analyzer while a main-vibration by the main-vibration electrode is stopped and the crystal oscillator is in a built-in state with a packaged device that includes a circuit having a different function from the oscillation circuit and uses a clock signal generated from the crystal oscillator;

obtaining frequency characteristics of impedance between the plurality of sub-vibration electrodes using the analyzer from an output signal of the plurality of sub-vibration electrodes by scanning frequency of the input signal from the analyzer;

comparing the frequency characteristics of impedance obtained at the obtaining with reference frequency characteristics of impedance prepared in advance indicating quality of the crystal oscillator when the crystal oscillator is in a normal condition; and

determining whether the crystal oscillator is in the normal condition or in an abnormal condition based on a result from the comparing while the crystal oscillator is in the built-in state with the packaged device,

wherein the generating the sub-vibration applies a first sinusoidal wave to a portion of the plurality of sub-vibration electrodes and applies a second sinusoidal wave having an opposite phase to the first sinusoidal wave to the rest of the plurality of sub-vibration electrodes in order to generate the alternating electric field between the plurality of sub-vibration electrodes and causes a change in contour of the crystal blank by the alternating electric field.

2. The method according to claim 1, wherein the main-vibration electrode is electrically separated from the plurality of sub-vibration electrodes.

3. The method according to claim 1 further comprising:

specifying at least one of a peak value of an impedance and a peak frequency where the impedance is in the peak value from the frequency characteristics of impedance obtained at the obtaining according to the sub-vibration.

4. The method according to claim 3 further comprising:

comparing at least one of the peak frequency and the peak value in the frequency characteristics of impedance obtained at the specifying according to the sub-vibration with a corresponding reference value or reference range in the reference frequency characteristics of impedance prepared in advance.

5. The method according to claim 3 further comprising:

comparing each of the peak frequency and the peak value in the frequency characteristics of impedance with each corresponding reference value or reference range in the reference frequency characteristics of impedance prepared in advance; and

determining a form of defect of the crystal oscillator as the abnormal condition of the crystal oscillator based on the result of the comparing each of the peak frequency and the peak value in the frequency characteristics of impedance with each corresponding reference value or reference range in the reference frequency characteristics of impedance prepared in advance.

6. The method according to claim 5, wherein the form of defect is one of a time deterioration of the crystal oscillator, an adhesion of alien substance to the crystal oscillator, and a damage to the crystal oscillator.