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Methods and apparatus for a capacitive pressure sensor

  • US 10,268,328 B2
  • Filed: 07/12/2017
  • Issued: 04/23/2019
  • Est. Priority Date: 07/12/2017
  • Status: Active Grant
First Claim
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1. A capacitive sensor, comprising:

  • a first substrate, having a first surface, comprising a protective material; and

    a second substrate, having a first surface adjacent to the first surface of the first substrate, comprising;

    a capacitor comprising;

    a first electrode; and

    a second electrode positioned substantially coplanar with the first electrode;

    wherein the first electrode and the second electrode form a capacitance;

    wherein;

    a gap is disposed between the first and second substrates;

    the first substrate deforms under the applied pressure to a second surface of the first substrate and reduces at least a portion of the gap between the first and second substrates; and

    the second substrate maintains its shape under the applied pressure.

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