AMOLED display panel manufacturing method, apparatus and system

• US 10,270,067 B2
• Filed: 03/04/2016
• Issued: 04/23/2019
• Est. Priority Date: 03/16/2015
• Status: Active Grant

• Current Assignee: BOE Technology Group Co., Ltd., Hefei Xinsheng Optoelectronics Technology Company Limited (BOE Technology Group Co., Ltd.)
• Original Assignee: BOE Technology Group Co., Ltd., Hefei Xinsheng Optoelectronics Technology Company Limited (BOE Technology Group Co., Ltd.)
• Inventors: Qian, Guoping, Jing, Yangkun, Wu, Chengye, Wang, Bei
• Primary Examiner(s): Turner, Brian
• Application Number:
  US15/321,550
• Publication Number:
  US 20170214005A1
• Time in Patent Office: 1,145 Days
• CPC Class Codes: G06T 2207/30148 Semiconductor; IC; Wafer
• CPC Class Codes: G06T 7/0004 Industrial image inspection
• CPC Class Codes: G06T 7/62 of area, perimeter, diameter or volume
• CPC Class Codes: H01L 21/77 Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate electrically programmable read-only memories or multistep manufacturing processes therefor H10B69/00
• CPC Class Codes: H10K 59/00 Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
• CPC Class Codes: H10K 59/12 Active-matrix OLED [AMOLED] displays
• CPC Class Codes: H10K 59/1201 Manufacture or treatment
• CPC Class Codes: H10K 59/8794 Arrangements for heating and cooling
• CPC Class Codes: H10K 71/00 Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: H10K 71/166 using selective deposition, e.g. using a mask

Abstract

The present disclosure discloses an AMOLED display panel manufacturing method, apparatus and system. The method comprises: collecting size parameters of a substrate, constructing an AMOLED display panel model based on the size parameters, and determining spray data of respective organic vapor materials; controlling corresponding spraying devices to spray the respective organic vapor materials on the substrate successively according to the determined spray data of the respective organic vapor materials, to form an AMOLED display panel.

Claims

1. A method of manufacturing an AMOLED display panel, comprising:

providing a substrate;

collecting size parameters of the substrate;

constructing an AMOLED display panel model based on the size parameters, and determining spray data of respective organic vapor materials according to the constructed AMOLED display panel model, wherein the spray data includes a spray sequence, a spray pattern and a spray thickness;

controlling corresponding spraying devices to spray the respective organic vapor materials on the substrate successively based on the spray sequence according to the determined spray data of the respective organic vapor materials, to form an AMOLED display panel without a mask.

2. The method according to claim 1, wherein collecting size parameters of the substrate comprises:

collecting image information of the substrate using an image sensor of an electric coupling device;

obtaining three-dimensional size parameters of the substrate based on the image information.

3. The method according to claim 2, after a pattern of any film layer is formed by spraying, further comprising:

detecting whether spray data of a formed geometrical pattern is consistent with acquired spray data, if so, continuing to spray a next geometrical pattern;

otherwise, correcting the acquired spray data to ensure that spray data of a geometrical pattern subsequently formed by spraying is consistent with the acquired spray data.

4. The method according to claim 1, wherein constructing an AMOLED display panel model based on the size parameters, and determining spray data of respective organic vapor materials according to the constructed AMOLED display panel model comprise:

establishing an AMOLED display panel model based on the size parameters, acquiring material types, geometrical patterns and film layer thicknesses of respective film layers in the AMOLED display panel model;

selecting suitable organic vapor materials according to the acquired material types of the respective film layers; and

,

setting suitable spray data for the selected organic vapor materials according to the acquired geometrical patterns and film layer thicknesses of the respective film layers.

5. The method according to claim 4, after a pattern of any film layer is formed by spraying, further comprising:

detecting whether spray data of a formed geometrical pattern is consistent with acquired spray data, if so, continuing to spray a next geometrical pattern;

otherwise, correcting the acquired spray data to ensure that spray data of a geometrical pattern subsequently formed by spraying is consistent with the acquired spray data.

6. The method according to claim 1, wherein controlling corresponding spraying devices to spray the respective organic vapor materials on the substrate successively based on the spray sequence according to the determined spray data of the respective organic vapor materials, to form an AMOLED display panel comprises:

for each film layer to be formed, controlling a spraying device to spray the organic vapor material on the substrate to form a geometrical pattern profile of the film layer according to spray data of a respective organic vapor material;

repeatedly spraying the organic vapor material on the geometrical pattern profile by controlling a relative movement between the spraying device and the substrate until a geometrical pattern of the current film layer thickness is formed;

forming the AMOLED display panel after all the organic vapor materials are sprayed on the substrate successively based on the spray sequence.

7. The method according to claim 6, after a pattern of any film layer is formed by spraying, further comprising:

detecting whether spray data of a formed geometrical pattern is consistent with acquired spray data, if so, continuing to spray a next geometrical pattern;

otherwise, correcting the acquired spray data to ensure that spray data of a geometrical pattern subsequently formed by spraying is consistent with the acquired spray data.

8. The method according to claim 1, after a pattern of any film layer is formed by spraying, further comprising:

detecting whether spray data of a formed geometrical pattern is consistent with acquired spray data, if so, continuing to spray a next geometrical pattern;

otherwise, correcting the acquired spray data to ensure that spray data of a geometrical pattern subsequently formed by spraying is consistent with the acquired spray data.

9. An apparatus for manufacturing an AMOLED display panel, comprising:

a provision unit for providing a substrate;

a collection unit for collecting size parameters of the substrate;

a modeling unit for constructing an AMOLED display panel model based on the size parameters collected by the collection unit, and for determining spray data of respective organic vapor materials according to the constructed AMOLED display panel model, wherein the spray data includes a spray sequence, a spray pattern and a spray thickness;

a control unit for controlling a plurality of spraying devices to spray the respective organic vapor materials onto the substrate successively based on the spray data determined by the modeling unit to form an AMOLED display panel.

10. The apparatus according to claim 9, wherein the collection unit is configured to:

collecting image information of the substrate using an image sensor of an electrical coupling device;

obtaining three-dimensional size parameters of the substrate based on the image information.

11. The apparatus according to claim 9, wherein the modeling unit is configured to:

establishing an AMOLED display panel model based on the size parameters, acquiring material types, geometrical patterns and film layer thicknesses of respective film layers in the AMOLED display panel model;

selecting suitable organic vapor materials according to the acquired material types of the respective film layers; and

,

setting suitable spray data for the selected organic vapor materials according to the acquired geometrical patterns and film layer thicknesses of the respective film layers.

12. The apparatus according to claim 9, wherein the control unit is configured to:

for each film layer to be formed, controlling a spraying device to spray the organic vapor material on the substrate to form a geometrical pattern profile of the film layer according to spray data of a respective organic vapor material;

repeatedly spraying the organic vapor material on the geometrical pattern profile by controlling a relative movement between the spraying device and the substrate until a geometrical pattern of the current film layer thickness is formed;

forming the AMOLED display panel after all the organic vapor materials are sprayed on the substrate successively based on the spray sequence.

13. The apparatus according to claim 9, further comprising:

a detection unit for detecting, after a pattern of any film layer is formed by spraying, whether spray data of a formed geometrical pattern is consistent with acquired spray data, if so, continuing to spray a next geometrical pattern;

otherwise, correcting the acquired spray data to ensure that spray data of a geometrical pattern subsequently formed by spraying is consistent with the acquired spray data.

14. A system for manufacturing an AMOLED display panel, comprising:

a spraying device;

an apparatus for manufacturing an AMOLED display panel which is coupled to the spraying device; and

an organic vapor material chamber coupled to the apparatus for manufacturing an AMOLED display panel,

wherein the apparatus for manufacturing an AMOLED display panel comprises;

a provision unit for providing a substrate;

a collection unit for collecting size parameters of the substrate;

a modeling unit for constructing an AMOLED display panel model based on the size parameters collected by the collection unit, and for determining spray data of respective organic vapor materials according to the constructed AMOLED display panel model, wherein the spray data includes a spray sequence, a spray pattern and a spray thickness;

a control unit for controlling a plurality of spraying devices to spray the respective organic vapor materials onto the substrate successively based on the spray data determined by the modeling unit to form an AMOLED display panel.

15. The system according to claim 14, wherein the apparatus for manufacturing an AMOLED display panel further comprises:

a bearing panel for bearing a substrate to be handled.

16. The system according to claim 15, further comprising:

a curing device disposed beneath the bearing panel for cooling the organic vapor material sprayed onto the substrate.

17. The system according to claim 14, wherein the collection unit is configured to:

collecting image information of the substrate using an image sensor of an electrical coupling device;

obtaining three-dimensional size parameters of the substrate based on the image information.

18. The system according to claim 14, wherein the modeling unit is configured to:

establishing an AMOLED display panel model based on the size parameters, acquiring material types, geometrical patterns and film layer thicknesses of respective film layers in the AMOLED display panel model;

selecting suitable organic vapor materials according to the acquired material types of the respective film layers; and

,

setting suitable spray data for the selected organic vapor materials according to the acquired geometrical patterns and film layer thicknesses of the respective film layers.

19. The system according to claim 14, wherein the control unit is configured to:

for each film layer to be formed, controlling a spraying device to spray the organic vapor material on the substrate to form a geometrical pattern profile of the film layer according to spray data of a respective organic vapor material;

repeatedly spraying the organic vapor material on the geometrical pattern profile by controlling a relative movement between the spraying device and the substrate until a geometrical pattern of the current film layer thickness is formed;

forming the AMOLED display panel after all the organic vapor materials are sprayed on the substrate successively based on the spray sequence.

20. The system according to claim 14, wherein the apparatus for manufacturing an AMOLED display panel further comprising:

a detection unit for detecting, after a pattern of any film layer is formed by spraying, whether spray data of a formed geometrical pattern is consistent with acquired spray data, if so, continuing to spray a next geometrical pattern;

otherwise, correcting the acquired spray data to ensure that spray data of a geometrical pattern subsequently formed by spraying is consistent with the acquired spray data.