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Optical inspection system and method including accounting for variations of optical path length within a sample

  • US 10,274,426 B2
  • Filed: 09/27/2017
  • Issued: 04/30/2019
  • Est. Priority Date: 12/23/2014
  • Status: Active Grant
First Claim
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1. An optical inspection system for optically characterizing a sample, comprising:

  • an illuminator/collector assembly configured to deliver multiple incident light rays to the sample and collect multiple return light rays returning from the sample;

    a sensor that includes a plurality of zones, each zone measuring ray intensity as a function of ray position and ray angle for the respective collected return light rays;

    a ray selector configured to select a first subset of light rays from the collected multiple return light rays at the sensor that meet a first selection criterion, wherein the first selection criterion is associated with a single scattering event; and

    a computer including a characterizer configured to determine a physical property of the sample based on the ray intensities, ray positions, and ray angles for the first subset of light rays.

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