Micro-stimulation and data acquisition from biological cells

• US 10,274,452 B2
• Filed: 06/12/2013
• Issued: 04/30/2019
• Est. Priority Date: 06/12/2012
• Status: Active Grant

• Current Assignee: IMEC International, Katholieke Universiteit Leuven
• Original Assignee: IMEC International, Katholieke Universiteit Leuven
• Inventors: Collaert, Nadine, Cott, Daire J., De Volder, Michael
• Primary Examiner(s): Behringer, Luther
• Application Number:
  US13/916,308
• Publication Number:
  US 20130341185A1
• Time in Patent Office: 2,148 Days
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: G01N 27/308 at least partially made of carbon
• CPC Class Codes: G01N 27/327 Biochemical electrodes , e.g. electrical or mechanical details for in vitro measurements
• CPC Class Codes: G01N 33/4836 using multielectrode arrays

Abstract

The present invention relates to a method for fabricating a semiconductor device for stimulation and/or data recording of biological material to a such semiconductor device. The method comprises providing a semiconductor substrate comprising a first insulating layer; providing a patterned conductive layer on top of the first insulating layer; depositing and patterning a second insulating layer atop the patterned conductive layer; growing carbon nano-sheets atop the second insulating layer; and defining carbon nano-sheet electrode areas on the second insulating layer by etching away the carbon nano-sheets outside of the carbon nano-sheet electrode areas.

Claims

1. A semiconductor device for stimulating and/or data recording of a biological material, the semiconductor device comprising:

an electrode element which comprises;

a semiconductor substrate;

an electrode layer that comprises at least one electrode, the electrode layer further comprising;

a conducting layer; and

one or more carbon nano-sheets that are supported by the conducting layer such that a test medium comprising biological material can be placed in direct contact with the one or more carbon nano-sheets; and

an insulating layer arranged between the semiconductor substrate and the electrode layer; and

integrated circuitry that is complementary metal oxide semiconductor (CMOS) compatible and biocompatible, and is connected to the electrode element and adapted for at least one of recording or stimulating at least one biological cell in vitro via the electrode layer.

2. The semiconductor device according to claim 1, wherein the electrode element is at least one of packaged atop the integrated circuitry or processed atop the integrated circuitry.

3. The semiconductor device according to claim 1, wherein the integrated circuitry comprises a complementary metal oxide semiconductor (CMOS) device or a printed circuit board (PCB), the integrated circuitry being further adapted for amplification and signal processing of a signal obtained from the electrode element.

4. The semiconductor device according to claim 1, further comprising a ring configured for containing the test medium comprising the biological material, wherein the ring is attached to the electrode element.

5. The semiconductor device according to claim 1, wherein the semiconductor device is an implantable device adapted for at least one of recording signals from neural tissue or stimulating the neural tissue.

6. The semiconductor device of claim 1, wherein the electrode layer is formed on the insulating layer.

8. The semiconductor device of claim 1, wherein the conducting layer comprises titanium nitride (TiN), platinum, or a metal oxide.

9. The semiconductor device of claim 1, wherein the insulating layer contacts the electrode layer and the semiconductor substrate.

7. A biosensing system comprising a semiconductor device, wherein the semiconductor device comprises:

an electrode element which comprises;

a semiconductor substrate;

an electrode layer that comprises at least one electrode, the electrode layer further comprising;

a conducting layer; and

one or more carbon nano-sheets that are supported by the conducting layer such that a test medium comprising biological material can be placed in direct contact with the one or more carbon nano-sheets; and

an insulating layer arranged between the semiconductor substrate and the electrode layer; and

integrated circuitry that is complementary metal oxide semiconductor (CMOS) compatible and biocompatible, and is connected to the electrode element and adapted for at least one of recording or stimulating at least one biological cell in vitro via the electrode layer.

10. The biosensing system of claim 7, wherein the conducting layer comprises titanium nitride (TiN), platinum, or a metal oxide.

11. The biosensing system of claim 7, wherein the insulating layer contacts the electrode layer and the semiconductor substrate.

12. The biosensing system of claim 7, wherein the electrode element is at least one of packaged atop the integrated circuitry or processed atop the integrated circuitry.

13. The biosensing system of claim 7, wherein the integrated circuitry comprises a complementary metal oxide semiconductor (CMOS) device or a printed circuit board (PCB), the integrated circuitry being further adapted for amplification and signal processing of a signal obtained from the electrode element.

14. The biosensing system of claim 7, further comprising a ring configured for containing the test medium comprising the biological material, wherein the ring is attached to the electrode element.

15. The biosensing system of claim 7, wherein the semiconductor device is an implantable device adapted for at least one of recording signals from neural tissue or stimulating the neural tissue.

16. The biosensing system of claim 7, wherein the electrode layer is formed on the insulating layer.