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Multi-zone reactor, system including the reactor, and method of using the same

  • US 10,276,355 B2
  • Filed: 03/12/2015
  • Issued: 04/30/2019
  • Est. Priority Date: 03/12/2015
  • Status: Active Grant
First Claim
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1. A multi-zone gas-phase reactor comprising:

  • a plurality of vertically-stacked reaction zones comprising a first reaction zone and a second reaction zone, wherein each reaction zone comprises a gas inlet on a first side of the multi-zone gas-phase reactor and an exhaust outlet on a second side of the multi-zone gas-phase reactor;

    a moveable top plate comprising a bottom surface; and

    a movable susceptor assembly comprising a susceptor having a top surface,wherein a movable processing region comprises the bottom surface, the top surface and one or more reaction zones,wherein the moveable top plate and the susceptor assembly are each configured to move independently in a vertical direction within the multi-zone gas-phase reactor during processing of a substrate, andwherein the substrate is disposed on the top surface and is exposed to a first process in the first reaction zone and a second process in the second reaction zone.

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