Method for producing a micro-LED matrix, micro-LED matrix and use of a micro-LED matrix
First Claim
1. A method for producing a flexible micro-LED matrix comprising the following method steps:
- A depositing an LED layer structure onto a working substrate (5);
B singulating a plurality of LED structures (6) from the LED layer structure on the working substrate (5) into singulated LED structures (6);
C applying a first contact-making structure (4) to a carrier substrate (1);
D bonding the working substrate (5) to the carrier substrate (1), filling a second flexible polymer layer (13) between the singulated LED structures (6) to form embedded LED structures, and transferring the embedded LED structures (6) from the working substrate (5) to the carrier substrate (1) by laser lift-off; and
an at least two-layered carrier substrate (1) is used, comprising a carrier layer (2) and a first flexible polymer layer (3), in method step C the first contact-making structure (4) is applied indirectly or directly to that side of the first flexible polymer layer (3) which faces away from the carrier layer (2).
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Accused Products
Abstract
A method for producing a micro-LED matrix by (A) depositing an LED layer structure onto a working substrate; (B) singulating a plurality of LED structures from the LED layer structure on the working substrate; (C) applying a first contact-making structure to a carrier substrate; and (D) transferring the plurality of LED structures from the working substrate to the carrier substrate by bonding and laser lift-off. An at least two-layered carrier substrate is used, including a carrier layer and a first flexible polymer layer, in step C the first contact-making structure is applied indirectly or directly to a side of the first polymer layer which faces away from the carrier layer, and in an additional method step D-0 between method steps C and D, a second flexible polymer layer is formed at least between the singulated LED structures. A micro-LED matrix and use are also provided.
8 Citations
7 Claims
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1. A method for producing a flexible micro-LED matrix comprising the following method steps:
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A depositing an LED layer structure onto a working substrate (5); B singulating a plurality of LED structures (6) from the LED layer structure on the working substrate (5) into singulated LED structures (6); C applying a first contact-making structure (4) to a carrier substrate (1); D bonding the working substrate (5) to the carrier substrate (1), filling a second flexible polymer layer (13) between the singulated LED structures (6) to form embedded LED structures, and transferring the embedded LED structures (6) from the working substrate (5) to the carrier substrate (1) by laser lift-off; and an at least two-layered carrier substrate (1) is used, comprising a carrier layer (2) and a first flexible polymer layer (3), in method step C the first contact-making structure (4) is applied indirectly or directly to that side of the first flexible polymer layer (3) which faces away from the carrier layer (2). - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification