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Method for producing a micro-LED matrix, micro-LED matrix and use of a micro-LED matrix

  • US 10,276,631 B2
  • Filed: 10/01/2013
  • Issued: 04/30/2019
  • Est. Priority Date: 10/01/2012
  • Status: Active Grant
First Claim
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1. A method for producing a flexible micro-LED matrix comprising the following method steps:

  • A depositing an LED layer structure onto a working substrate (5);

    B singulating a plurality of LED structures (6) from the LED layer structure on the working substrate (5) into singulated LED structures (6);

    C applying a first contact-making structure (4) to a carrier substrate (1);

    D bonding the working substrate (5) to the carrier substrate (1), filling a second flexible polymer layer (13) between the singulated LED structures (6) to form embedded LED structures, and transferring the embedded LED structures (6) from the working substrate (5) to the carrier substrate (1) by laser lift-off; and

    an at least two-layered carrier substrate (1) is used, comprising a carrier layer (2) and a first flexible polymer layer (3), in method step C the first contact-making structure (4) is applied indirectly or directly to that side of the first flexible polymer layer (3) which faces away from the carrier layer (2).

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