Acoustic MEMs resonator and filter with fractal electrode and method for producing the same
First Claim
1. A method comprising:
- providing a fractal generator function;
providing three or more line segments;
applying the fractal generator function to each of the three or more line segments to form three or more respective fractal line segments, each of the three or more fractal line segments having a respective start point and endpoint and at least four sub-segments; and
connecting an endpoint of each one of the three or more fractal line segments to a successive start point of another of the three or more fractal line segments to form a closed-loop contour line representative of an area of an electrode of a bulk acoustic wave (BAW) resonator, the closed-loop contour line having a fractal dimension that is greater than one and less than two.
2 Assignments
0 Petitions
Accused Products
Abstract
Methods of designing a BAW resonator having fractal geometry and the resulting devices are provided. Embodiments include providing a fractal generator function; providing three or more line segments; applying the fractal generator function to each of the three or more line segments to form three or more respective fractal line segments, each of the three or more fractal line segments having a respective start point and endpoint and at least four sub-segments; and connecting an endpoint of each one of the three or more fractal line segments to a successive start point of another of the three or more fractal line segments to form a closed-loop contour line representative of an area of an electrode of a BAW resonator, the closed-loop contour line having a fractal dimension that is greater than one and less than two.
-
Citations
20 Claims
-
1. A method comprising:
-
providing a fractal generator function; providing three or more line segments; applying the fractal generator function to each of the three or more line segments to form three or more respective fractal line segments, each of the three or more fractal line segments having a respective start point and endpoint and at least four sub-segments; and connecting an endpoint of each one of the three or more fractal line segments to a successive start point of another of the three or more fractal line segments to form a closed-loop contour line representative of an area of an electrode of a bulk acoustic wave (BAW) resonator, the closed-loop contour line having a fractal dimension that is greater than one and less than two. - View Dependent Claims (2, 3, 4, 5, 6, 7)
-
-
8. A device comprising:
-
a first electrode made of conductive material, a perimeter of at least one first electrode being defined by a closed-loop contour with fractal dimensions greater than one and less than two and a parameterized fractal function or an arbitrary suitable function that is subjected to parametrization and fractalization; an acoustic layer adjacent to the first electrode, the first electrode interfacing with a first plane of the acoustic layer; and a second electrode adjacent to the acoustic layer, the second electrode made of conductive material and interfacing with a second plane of the acoustic layer. - View Dependent Claims (9, 10, 11, 12, 13)
-
-
14. A method comprising:
-
providing a target Q factor for a resonator; providing a first pattern representative of a first electrode, the pattern having a closed-loop contour line having fractal dimensions based on a parameterized fractal function or an arbitrary suitable function that is subjected to parametrization and fractalization, the fractal dimensions being greater than one and less than two; providing a second pattern representative of an area of a second electrode to be layered with the first electrode, the layering of the second pattern and the first pattern representing an effective area of the resonator; and determining whether the target Q factor is met for the resonator based on the area and the perimeter of the closed-loop contour line. - View Dependent Claims (15, 16, 17, 18, 19, 20)
-
Specification