Load lock door assembly, load lock apparatus, electronic device processing systems, and methods

• US 10,278,501 B2
• Filed: 04/17/2015
• Issued: 05/07/2019
• Est. Priority Date: 04/25/2014
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Weiss, Eran, Morey, Travis, Merry, Nir, Reuter, Paul B., Kremerman, Izya, Hudgens, Jeffrey C., Hruzek, Dean C.
• Primary Examiner(s): Jarrett, Ronald P
• Assistant Examiner(s): Berry, Jr., Willie
• Application Number:
  US14/689,342
• Publication Number:
  US 20150311102A1
• Time in Patent Office: 1,481 Days
• Field of Search: 414411, 414217
• CPC Class Codes: A47B 96/00 Details of cabinets, racks or shelf units not covered by a single one of groups A47B43/00 - A47B95/00; General details of furniture doors E06B
• CPC Class Codes: H01L 21/67126 Apparatus for sealing, encapsulating, glassing, decapsulating or the like processes H01L23/02, H01L23/28
• CPC Class Codes: H01L 21/67201 characterized by the construction of the load-lock chamber

Abstract

A load lock door assembly with side actuation is disclosed. Load lock door assembly includes a load lock door and a door support assembly coupled thereto. Door support assembly includes one or more pivot members pivotable relative to one or more sides of the load lock body, a door support bracket coupled to the load lock door, one or more separator side actuators coupled between the door support bracket being actuatable to separate the load lock door from a sealing surface, and one or more pivot side actuator operable to pivot the load lock door above or below the load lock entry. Load lock apparatus with side actuation, systems including one or more load lock door assemblies with side actuation, and methods of operating load lock door assemblies are provided, as are numerous other aspects.

Claims

1. A load lock door assembly, comprising:

a load lock door adapted to seal against a sealing surface proximate to a load lock entry of a load lock body, the load lock door having a first lateral side and a second lateral side; and

a door support assembly coupled to the load lock door, the door support assembly including;

one or more pivot members operatively pivotable relative to one or more sides of the load lock body,

a door support bracket coupled to the load lock door,

a first separator side actuator coupled between the door support bracket and a first one of the one or more pivot members, a second separator side actuator coupled between the door support bracket and a second one of the one or more pivot members, the first separator side actuator and the second separator side actuator configured to actuate sequentially to separate the first lateral side of the load lock door from the sealing surface before the second lateral side of the load lock door, and one or more pivot side actuators operable to pivot the load lock door;

wherein the first separator side actuator is disposed on the load lock body at a first side of the load lock body, and the one or more pivot members include a slide feature that is configured to mate with a slide feature of the door support bracket.

2. The load lock door assembly of claim 1, wherein the load lock door and the door support assembly are housed in a factory interface chamber.

3. The load lock door assembly of claim 1, wherein the second separator side actuator is disposed on a second side of the load lock body.

4. The load lock door assembly of claim 1, wherein the load lock door is first separable using the first separator side actuator and the second separator side actuator, and then pivotable using the one or more pivot side actuators.

5. The load lock door assembly of claim 1, wherein

a first pivot member of the one or more pivot members is disposed on the first side of the load lock body,

the first separator side actuator is disposed on the first side of the load lock body;

a first pivot side actuator of the one or more pivot side actuators is disposed on the first side of the load lock body;

a second pivot member of the one or more pivot members is disposed on a second side of the load lock body,

the second separator side actuator is disposed on the second side of the load lock body; and

a second pivot side actuator of the one or more pivot side actuators is disposed on the second side of the load lock body.

6. The load lock door assembly of claim 1, further comprising a linear slide configured and operative to allow translation of the door support bracket relative to a first pivot member of the one or more pivot members.

7. The load lock door assembly of claim 1, wherein the door support bracket and load lock door pivot about a vertical axis.

8. A load lock door assembly, comprising:

a load lock door adapted to seal against a sealing surface proximate to a load lock entry of a load lock body; and

a door support assembly coupled to the load lock door, the door support assembly including;

one or more pivot members operatively pivotable relative to one or more sides of the load lock body,

a door support bracket coupled to the load lock door,

one or more separator side actuators respectively coupled between the door support bracket and the one or more pivot members, and actuatable to separate the load lock door from the sealing surface, and

one or more pivot side actuators operable to pivot the load lock door;

wherein a first separator side actuator of the one or more separator side actuators is disposed on the load lock body at a first side of the load lock body, and

wherein at least one of the one or more pivot members comprises a first slide portion configured and operative to slidably receive a second slide portion of the door support bracket, a first actuation support adapted to couple to a first one of the one or more separator side actuators, and a second actuation support adapted to couple to a first one of the one or more pivot side actuators.

9. A load lock door assembly, comprising:

a load lock door adapted to seal against a sealing surface proximate to a load lock entry of a load lock body, the load lock door having a first side and a second side; and

a door support assembly coupled to the load lock door, the door support assembly including;

one or more pivot members operatively pivotable relative to one or more sides of the load lock body,

a door support bracket coupled to the load lock door,

one or more separator side actuators respectively coupled between the door support bracket and the one or more pivot members, and actuatable to separate the load lock door from the sealing surface, and

one or more pivot side actuators operable to pivot the load lock door;

wherein a first separator side actuator of the one or more separator side actuators is disposed on the load lock body at a first side of the load lock body, and the one or more pivot members include a slide feature that is configured to mate with a slide feature of the door support bracket, and wherein the door support bracket comprises a pivot joint allowing the first side of the load lock door to be opened before the second side of the load lock door.

10. A load lock door assembly, comprising:

a load lock door adapted to seal against a sealing surface proximate to a load lock entry of a load lock body, the load lock door having a first side and a second side; and

a door support assembly coupled to the load lock door, the door support assembly including;

one or more pivot members operatively pivotable relative to one or more sides of the load lock body,

a door support bracket coupled to the load lock door,

one or more separator side actuators respectively coupled between the door support bracket and the one or more pivot members, and actuatable to separate the load lock door from the sealing surface, and

one or more pivot side actuators operable to pivot the load lock door;

wherein a first separator side actuator of the one or more separator side actuators is disposed on the load lock body at a first side of the load lock body, and the one or more pivot members include a slide feature that is configured to mate with a slide feature of the door support bracket, and wherein the door support bracket comprises a flexibility allowing the first side of the load lock door to be opened before the second side of the load lock door.

11. A load lock apparatus, comprising:

a load lock chamber adapted to be coupled to, and accessed from, a transfer chamber of a mainframe housing and a factory interface chamber, the load lock chamber formed in a load lock body having a first side and a second side, a load lock entry, and a sealing surface proximate the load lock entry; and

a load lock door assembly operable with the load lock entry, the load lock door assembly including;

a load lock door, the load lock door having a first lateral side and a second lateral side and

a door support assembly coupled between the load lock door and the load lock body, the door support assembly including;

a pivot bracket operatively pivotable relative to the first side,

a door support bracket coupled to the load lock door,

a first separator side actuator coupled between the door support bracket and a first pivot member, a second separator side actuator coupled between the door support bracket and a second pivot member, the first separator side actuator and the second separator side actuator configured to actuate sequentially to separate the first lateral side of the load lock door from the sealing surface before the second lateral side of the load lock door, and

a pivot side actuator operable between the pivot bracket and the load lock body to pivot the load lock door,

wherein the pivot bracket includes a slide feature that is configured to mate with a slide feature of the door support bracket.

12. An electronic device processing system, comprising:

a mainframe housing including a transfer chamber housing a robot configured to move substrates;

a factory interface having a factory interface chamber; and

a load lock apparatus coupled to the mainframe housing and the factory interface, the load lock apparatus including a load lock body and a load lock chamber, the load lock chamber accessible from the transfer chamber and the factory interface chamber, a load lock door assembly operable to seal an entry into the load lock chamber from the factory interface chamber, the load lock door assembly including;

a load lock door sealable against a sealing surface proximate to the entry, the load lock door having a first lateral side and a second lateral side; and

a door support assembly coupled to the load lock door, the door support assembly including;

one or more pivot members operatively pivotable relative to one or more sides of the load lock body,

a door support bracket coupled to the load lock door,

a first separator side actuator coupled between the door support bracket and a first one of the one or more pivot members, a second separator side actuator coupled between the door support bracket and a second one of the one or more pivot members, the first separator side actuator and the second separator side actuator configured to actuate sequentially to separate the first lateral side of the load lock door from the sealing surface before the second lateral side of the load lock door, and

one or more pivot side actuator operable to pivot the load lock door

wherein the one or more pivot members includes a slide feature that is configured to mate with a slide feature of the door support bracket.