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Substrates and optical systems having a waveguide, nanometer-scale apertures, a lens array, and sensing regions and methods of use thereof

  • US 10,280,457 B2
  • Filed: 06/21/2017
  • Issued: 05/07/2019
  • Est. Priority Date: 09/16/2008
  • Status: Active Grant
First Claim
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1. An integrated optical system comprising:

  • a waveguide comprising a cladding layer and an optical waveguide layer;

    a plurality of nanoholes in the cladding layer;

    a microlens array; and

    a detector comprising a plurality of sensing regions;

    wherein the plurality of nanoholes and the microlens array are positioned on opposite sides of the optical waveguide, wherein the plurality of nanoholes are positioned to be illuminated by an evanescent field emanating from the optical waveguide when optical energy is propagated therethrough, and wherein the microlens array is configured to collect optical energy signals emitted from each of the plurality of nanoholes and send the collected optical energy signals to the plurality sensing regions of the detector.

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