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Confocal surface topography measurement with fixed focal positions

  • US 10,281,266 B2
  • Filed: 02/27/2018
  • Issued: 05/07/2019
  • Est. Priority Date: 07/03/2014
  • Status: Active Grant
First Claim
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1. An apparatus for measuring surface topography of a three-dimensional structure, the apparatus comprising:

  • a hand-held optical probe;

    an illumination unit configured to generate a plurality of incident light beams;

    an optical system configured to focus each of incident light beams to respective focal planes relative to the hand-held optical probe, the focal lengths being fixed during surface topology measurement;

    a motion tracking device configured to collect motion data during surface topology measurement;

    a detector unit configured to measure a characteristic of each of a plurality of returned light beams that are generated by illuminating the three-dimensional structure with the plurality of incident light beams in order to measure the surface topography of the three-dimensional structure; and

    a processing unit comprising one or more processors and a tangible non-transitory storage medium storing instructions executable by the one or more processors to cause the one or more processors to process the motion data to determine relative position and orientation of the hand-held optical probe with respect to the three-dimensional structure and determine surface topography of the three-dimensional structure based on the measured characteristic of each of the plurality of returned light beams and the motion data.

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