×

Device and method for estimating a flow of gas in an enclosure maintained at reduced pressure in relation to the gas

  • US 10,281,304 B2
  • Filed: 11/06/2013
  • Issued: 05/07/2019
  • Est. Priority Date: 11/06/2012
  • Status: Active Grant
First Claim
Patent Images

1. A method for estimating a permeation of a gas barrier layer, comprising:

  • providing a permeameter including first and second chambers separated from each other by the gas barrier layer, wherein the first chamber is filled with at least one gas and the second chamber is maintained in a low pressure regimen relative to said at least one gas;

    providing a mass spectrometer in the second chamber of the permeameter;

    measuring, by the mass spectrometer, an evolution of a partial pressure of the at least one gas in the second chamber as a function of time;

    calculating, by processing circuitry, a gas flow Jmeasurement in the second chamber based on the measured partial pressure of the at least one gas in the second chamber;

    estimating, by the processing circuitry, values of parameters A and B iteratively implemented by decreasing an estimation error based on a difference between an estimation of the gas flow Jestim(t) and the measured gas flow Jmeasurement, whereinwhen the measured gas flow Jmeasurement corresponds to a pressure rise of the at least one gas in the second chamber, the estimation of the gas flow Jestim(t) is calculated according to the equation;

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×