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Sensing module substrate and sensing module including the same

  • US 10,282,587 B2
  • Filed: 12/30/2016
  • Issued: 05/07/2019
  • Est. Priority Date: 02/12/2016
  • Status: Active Grant
First Claim
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1. A sensing module substrate comprising:

  • a film substrate having a first surface and a second surface;

    sensing vias which extend completely through the film substrate and penetrate the first surface and the second surface, each of the sensing vias being configured to be coupled to pixels of a semiconductor chip; and

    an interconnection pattern provided on at least one of the first surface and the second surface of the film substrate.

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