Method of reforming insulating film deposited on substrate with recess pattern

• US 10,283,353 B2
• Filed: 03/29/2017
• Issued: 05/07/2019
• Est. Priority Date: 03/29/2017
• Status: Active Grant

• Current Assignee: ASM IP Holding B.V. (ASM International NV)
• Original Assignee: ASM IP Holding B.V. (ASM International NV)
• Inventors: Kobayashi, Akiko, Zaitsu, Masaru, Kobayashi, Nobuyoshi, Hori, Masaru
• Primary Examiner(s): Choudhry, Mohammad
• Application Number:
  US15/472,750
• Publication Number:
  US 20180286663A1
• Time in Patent Office: 769 Days
• CPC Class Codes: H01L 21/02164 the material being a silicon oxide, e.g. SiO2
• CPC Class Codes: H01L 21/0217 the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz H01L21/02126 and H01L21/0214 take precedence
• CPC Class Codes: H01L 21/02178 the material containing aluminium, e.g. Al2O3
• CPC Class Codes: H01L 21/02211 the compound being a silane, e.g. disilane, methylsilane or chlorosilane
• CPC Class Codes: H01L 21/02219 the compound comprising silicon and nitrogen
• CPC Class Codes: H01L 21/02274 in the presence of a plasma [PECVD]
• CPC Class Codes: H01L 21/0228 deposition by cyclic CVD, e.g. ALD, ALE, pulsed CVD
• CPC Class Codes: H01L 21/02318 post-treatment
• CPC Class Codes: H01L 21/0234 treatment by exposure to a plasma
• CPC Class Codes: H01L 21/0332 characterised by their composition, e.g. multilayer masks, materials
• CPC Class Codes: H01L 21/0337 characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
• CPC Class Codes: H01L 21/3105 After-treatment
• CPC Class Codes: H01L 21/31111 by chemical means
• CPC Class Codes: H01L 21/31116 by dry-etching

Abstract

A method of reforming an insulating film deposited on a substrate having a recess pattern constituted by a bottom and sidewalls, includes: providing the film deposited on the substrate having the recess pattern in an evacuatable reaction chamber, wherein a property of a portion of the film deposited on the sidewalls is inferior to that of a portion of the film deposited on a top surface of the substrate; adjusting a pressure of an atmosphere of the reaction chamber to 10 Pa or less, which atmosphere is constituted by H₂ and/or He without a precursor and without a reactant; and applying RF power to the atmosphere of the pressure-adjusted reaction chamber to generate a plasma to which the film is exposed, thereby reforming the portion of the film deposited on the sidewalls to improve the property of the sidewall portion of the film.

Claims

1. A method of reforming a conformal insulating film deposited on a substrate having a recess pattern constituted by a bottom and sidewalls, comprising:

(i) providing the film deposited on the substrate having the recess pattern in an evacuatable reaction chamber, wherein a wet-etching property of a portion of the film deposited on the sidewalls is inferior to that of a portion of the film deposited on a top surface of the substrate;

(ii) adjusting a pressure of an atmosphere of the reaction chamber to 10 Pa or less, which atmosphere is constituted by H₂ and/or He without a precursor and without a reactant; and

(iii) applying RF power to the atmosphere of the pressure-adjusted reaction chamber to generate a plasma to which the film is exposed, thereby reforming the portion of the film deposited on the sidewalls, without forming a film, to improve the property of the sidewall portion of the film.

2. The method according to claim 1, wherein the pressure of the atmosphere of the reaction chamber is 2 Pa or less.

3. The method according to claim 1, wherein in step (iii), RF power is applied at a power of 2 W/cm² or higher relative to the top surface of the substrate.

4. The method according to claim 1, wherein in step (ii), the atmosphere of the reaction chamber further contains N₂ at a concentration of 1% or less.

5. The method according to claim 1, wherein in step (i), a pressure of an atmosphere of the reaction chamber is controlled using a dry pump connected to the reaction chamber, and in step (ii), the pressure of the atmosphere of the reaction chamber is controlled using a turbomolecular pump connected to the reaction chamber.

6. The method according to claim 1, wherein in step (iii), the reforming of the portion of the film is accomplished by removing hydrogen contained in the film as an impurity, using the plasma.

7. The method according to claim 1, wherein in step (i), the film has a thickness of 10 nm or less.

8. The method according to claim 1, wherein step (iii) is conducted until the property of the sidewall portion of the film is improved to be substantially equivalent to the property of a portion of the film deposited on the bottom of the recess pattern or a top surface of the substrate.

9. The method according to claim 1, wherein the property of the film is resistance to wet etching.

10. The method according to claim 1, wherein the film is an oxide film or nitride film.

11. The method according to claim 10, wherein the film is selected from the group consisting of SiO₂, SiN, SiOC, SiCN, GeOx, GeN, AlOx, AlN, TiO₂, and TaO₂.

12. The method according to claim 1, wherein step (i) comprises depositing the film in the reaction chamber by cyclic deposition.

13. The method according to claim 12, wherein the film is deposited by one cycle or multiple cycles of the cyclic deposition.

14. The method according to claim 13, wherein the cyclic deposition is plasma-enhanced atomic layer deposition (PEALD).

15. The method according to claim 13, wherein steps (i) through (iii) are repeated.

16. The method according to claim 1, further comprising, between steps (i) and (ii), evacuating the reaction chamber to reduce the pressure to less than the pressure used in step (ii).

17. The method according to claim 1, wherein in step (ii), the atmosphere contains no gas other than H₂, He, and N₂.

18. The method according to claim 17, wherein the atmosphere consists of H₂.

19. The method according to claim 1, wherein the recess pattern is constituted by trenches having a width of 20 nm to 100 nm and an aspect ratio of 2 to 10.

20. The method according to claim 1, wherein in step (iii), RF power is applied to an upper electrode which is capacitively coupled with a lower electrode on which the substrate is placed.

21. The method according to claim 1, wherein in step (i), a portion of the film deposited on the bottom of the recess pattern is thicker than the portion at the sidewalls of the recess pattern and the portion at the top surface of the substrate.