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Polishers

  • US 10,286,516 B2
  • Filed: 10/06/2016
  • Issued: 05/14/2019
  • Est. Priority Date: 10/15/2015
  • Status: Active Grant
First Claim
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1. A polisher comprising:

  • a polishing pad having a polishing surface;

    a motor configured to generate a rotational drive force;

    an output member coupled to the polishing pad, so that the polishing pad moves with the output member;

    a transmission device configured to transmit the rotational drive force of the motor to the output member in a first mode and a second mode;

    a mode selection device (1) coupled to the transmission device, (2) configured to allow selection of one of the first mode and the second mode, so that the output member moves according to the selected mode, and (3) includes an engaging member movable between an engaging position and a disengaging position;

    an internal gear member; and

    a transmission housing configured to support the transmission device;

    wherein;

    the mode selection device is disposed at the transmission housing;

    the first mode causes the output member to resolve about a first axis and to freely rotate about a second axis displaced from the first axis;

    the second mode causes the output member to revolve about the first axis while forcibly rotating the output member about the second axis;

    the transmission device comprises;

    a support shaft portion configured to be rotatably driven about the first axis by the motor; and

    an eccentric shaft portion (1) that rotates with the support shaft portion about the first axis when the support shift portion is rotating and (2) defining the second axis,the output member (1) has an external gear portion and (2) is attached to the eccentric shaft portion so as to be rotatable relative to the eccentric shaft portion about the second axis;

    the internal gear member (1) is rotatable about the first axis relative to the transmission housing, (2) includes an internal gear portion that is in engagement with the external gear portion of the output member and (3) includes an engaging portion for engagement with the engaging member of the mode selection device;

    the first mode causes the engaging member to be disengaged from the engaging portion of the internal gear member to permit rotation of the internal gear member relative to the transmission housing, so that the output member is free to rotate about the second axis while the output member revolves around the first axis;

    the second mode causes the engaging member to engage the engaging portion of the internal gear member to prevent rotation of the internal gear member relative to the transmission housing, so that the output member is forced to rotate about the second axis while the output member revolves about the first axis;

    the engaging portion of the internal gear member comprises a plurality of engaging grooves formed in a radially outer periphery of the internal gear member;

    the engaging member of the mode selection device comprises an engaging pin movable between the engaging position and the disengaging position in a radial direction with respect to a rotational axis of the internal gear member.

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