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Integrated motion processing unit (MPU) with MEMS inertial sensing and embedded digital electronics

  • US 10,288,427 B2
  • Filed: 03/19/2015
  • Issued: 05/14/2019
  • Est. Priority Date: 07/06/2007
  • Status: Active Grant
First Claim
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1. A device comprising:

  • a gyroscope, wherein the gyroscope is operable to provide a measurement output corresponding to measurement of rotation about three axes, wherein the three axes are orthogonal, and the gyroscope is disposed in a plane;

    an application specific integrated circuit (ASIC) to receive the measurement output from the gyroscope, wherein the ASIC includes at least one analog receiver and processes data from the gyroscope, the ASIC being implemented on a first silicon substrate, and wherein the gyroscope is vertically stacked, is substantially parallel to the first silicon substrate and is electrically connected to the ASIC, wherein the first silicon substrate is distinct from a printed circuit board;

    a second silicon substrate that seals the gyroscope within a hermetic enclosure in between the first silicon substrate and the second silicon substrate, wherein the first silicon substrate and the second silicon substrate are the same material; and

    measurement devices, wherein the measurement devices includes two or more of an accelerometer, a position sensor, a barometer, a geomagnetic sensor, or a temperature sensor.

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