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Pressure sensor, especially pressure difference sensor

  • US 10,288,508 B2
  • Filed: 11/02/2016
  • Issued: 05/14/2019
  • Est. Priority Date: 10/30/2009
  • Status: Active Grant
First Claim
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1. A method for the preparation of a membrane bed of a pressure sensor, comprising the steps of:

  • (a) providing a planar glass layer, said glass layer having a thickness of not less than 200 μ

    m and not more than 2000 μ

    m;

    (b) applying the glass layer on a support body, which has a surface, which supports the glass layer, wherein the surface has at least one cavity, so that the glass layer is not supported in the region of the cavity, said at least one cavity having a circular symmetry, and said at least one cavity having a diameter of 3 mm to 10 mm;

    (c) heating the glass layer to a temperature or temperature range, at which the unsupported region of the glass layer sinks; and

    (d) allowing the glass layer to cool,wherein the membrane bed obtained by said method has an aspherical surface contour, which approximates the deflection curve of a measuring membrane, supported by said membrane bed.

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