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Capacitive pressure sensor with reduced sensitivity to temperature change

  • US 10,288,509 B2
  • Filed: 11/25/2014
  • Issued: 05/14/2019
  • Est. Priority Date: 11/25/2013
  • Status: Active Grant
First Claim
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1. A capacitive pressure sensor comprising:

  • a diaphragm that deforms under pressure;

    an electrode having an electrode face opposed to the diaphragm with a gap between the diaphragm and the electrode face;

    a body having one end to which the diaphragm is joined, and accommodating at least a portion of the electrode;

    an insulating positioning member that is provided in the body, and that positions at least the portion of the electrode accommodated in the body; and

    a pressing mechanism that is configured to hold and press the insulating positioning member or the electrode in a direction parallel to the diaphragm,wherein the pressing mechanism includes a position adjuster that includes a contact surface that is in contact with the insulating positioning member, the position adjuster configured to press the insulating positioning member in a direction oblique to the diaphragm andthe position adjuster includes a cutout portion comprising a recess that extends transverse to the contact surface and through the position adjustor.

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