Junction region between two waveguides and associated method of production
First Claim
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1. A photonic integrated device, comprising:
- a semiconductor substrate comprising a first lateral area, a second lateral area, a central area, a first intermediate area that is located between the first lateral area and the central area, and a second intermediate area that is located between the second lateral area and the central area,a first waveguide comprising a portion in the first lateral area, anda second waveguide comprising a portion in the second lateral area,wherein the first and second waveguides are mutually coupled by a junction region comprising a central junction region that is located in the central area, a first intermediate junction region and a second intermediate junction region extending, respectively, into the first and second intermediate areas while gradually widening in order to meet the central junction region so as to form a bulge, andwherein the first waveguide comprises a first part produced on a second part that is wider than the first part, andwherein the junction region comprises a portion of said second part that extends from the first lateral area into the first intermediate area and into a part of the central area while gradually narrowing until reaching a width of the central junction region.
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Abstract
A photonic integrated device includes a first waveguide and a second waveguide. The first and second waveguides are mutually coupled at a junction region the includes a bulge region.
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Citations
9 Claims
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1. A photonic integrated device, comprising:
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a semiconductor substrate comprising a first lateral area, a second lateral area, a central area, a first intermediate area that is located between the first lateral area and the central area, and a second intermediate area that is located between the second lateral area and the central area, a first waveguide comprising a portion in the first lateral area, and a second waveguide comprising a portion in the second lateral area, wherein the first and second waveguides are mutually coupled by a junction region comprising a central junction region that is located in the central area, a first intermediate junction region and a second intermediate junction region extending, respectively, into the first and second intermediate areas while gradually widening in order to meet the central junction region so as to form a bulge, and wherein the first waveguide comprises a first part produced on a second part that is wider than the first part, and wherein the junction region comprises a portion of said second part that extends from the first lateral area into the first intermediate area and into a part of the central area while gradually narrowing until reaching a width of the central junction region. - View Dependent Claims (2, 3, 4)
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5. A system comprising a photonic integrated device, wherein the photonic integrated device comprises:
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a semiconductor substrate comprising a first lateral area, a second lateral area, a central area, a first intermediate area that is located between the first lateral area and the central area, and a second intermediate area that is located between the second lateral area and the central area, a first waveguide comprising a portion in the first lateral area, and a second waveguide comprising a portion in the second lateral area, wherein the first and second waveguides are mutually coupled by a junction region comprising a central junction region that is located in the central area, a first intermediate junction region and a second intermediate junction region extending, respectively, into the first and second intermediate areas while gradually widening in order to meet the central junction region so as to form a bulge, and wherein the first waveguide comprises a first part produced on a second part that is wider than the first part, and wherein the junction region comprises a portion of said second part that extends from the first lateral area into the first intermediate area and into a part of the central area while gradually narrowing until reaching a width of the central junction region. - View Dependent Claims (6, 7, 8, 9)
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Specification