Laser direct writing for non-linear waveguides

• US 10,288,808 B1
• Filed: 01/22/2016
• Issued: 05/14/2019
• Est. Priority Date: 01/22/2016
• Status: Active Grant

• Current Assignee: Seagate Technology LLC (Seagate Technology Holdings Plc)
• Original Assignee: Seagate Technology LLC (Seagate Technology Holdings Plc)
• Inventors: Pitwon, Richard C. A.
• Primary Examiner(s): Malekzadeh, Seyed Masoud
• Assistant Examiner(s): Cummins, IV, Manley L
• Application Number:
  US15/004,573
• Time in Patent Office: 1,208 Days
• Field of Search: None
• CPC Class Codes: G02B 27/0927 Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
• CPC Class Codes: G02B 27/0955 Lenses lenses per se G02B3/00
• CPC Class Codes: G02B 27/0988 Diaphragms, spatial filters, masks for removing or filtering a part of the beam
• CPC Class Codes: G02B 3/14 of variable focal length
• CPC Class Codes: G02B 6/1221 made from organic materials
• CPC Class Codes: G02B 6/125 Bends, branchings or intersections
• CPC Class Codes: G02B 6/13 Integrated optical circuits characterised by the manufacturing method
• CPC Class Codes: G02B 6/138 by using polymerisation

Abstract

A waveguide includes multiple segments having different bend radii with substantially consistent cure profiles and related methods and systems for making and using the same. The waveguide is formed by modifying a laser beam used to write the waveguide to provide the consistent cure profile in the multiple segments. A marker characteristic of laser writing may be present in the waveguide. A method or system modifies an intensity profile or a shape profile of a laser beam to proactively compensate for exposure convolution based on the geometry of each waveguide segment. A convolution compensator is positioned in the path of the laser beam to modify the beam spot profile during writing to form the multiple segments of the waveguide in a photo-curable layer.

Claims

1. A system comprising:

an electromagnetic radiation source to cure a waveguide by directing a laser beam defining a spot profile; and

a convolution compensator positioned to modify at least one of an intensity profile and a shape of the spot profile and configured to, in response to at least one geometric property of the waveguide being written, dynamically compensate for exposure convolution in a photo-curable layer when the laser beam is directed at the photo-curable layer and translated along a non-linear path in a plane parallel to the photo-curable layer to form a non-linear waveguide segment of the waveguide, wherein the intensity profile and the shape of the spot profile each comprise an inner side and an outer side corresponding to a bend of the non-linear path, wherein during translation of the convolution compensator along the non-linear path, the convolution compensator is configured to decrease the intensity profile from the outer side toward the inner side, taper the shape of the spot profile from the outer side toward the inner side, or both.

2. The system of claim 1, wherein the convolution compensator comprises a reconfigurable filter to modify an intensity profile of the spot profile, an adaptive lens to modify a shape profile of the spot profile, or both.

3. The system of claim 1, wherein the spot profile modified by the convolution compensator compensates for exposure convolution based on at least a first geometric property of the non-linear waveguide segment to provide substantially matching waveguide curing profiles for the non-linear waveguide segment and another waveguide segment in series with the non-linear waveguide segment defining at least a second geometric property having a different value than the first geometric property.

4. The system of claim 3, wherein the first and second geometric properties are each a bend radius of the respective waveguide segment.

5. The system of claim 2, wherein at least one of:

the reconfigurable filter is continuously reconfigurable; and

the adaptable lens is continuously adaptable.

6. The system of claim 1, wherein the modified spot profile is rotatable by the convolution compensator.

7. The system of claim 1, further comprising:

a photo-curable layer; and

a translator coupled to the source to direct the source along a path to trace the non-linear waveguide segment in the photo-curable layer with the laser beam.

8. The system of claim 1, wherein the convolution compensator is further configured to form the non-linear waveguide segment with a uniform height portion.

9. The system of claim 1, wherein the convolution compensator is further configured to modify the shape of the spot profile to a closed conic section, an oval, a polygon, any rounded corner versions thereof, any symmetric versions thereof, any asymmetric versions thereof, any combination of linear or non-linear lines to form an outer perimeter, any tapered versions thereof, or any combinations thereof.

10. The system of claim 3, wherein the another waveguide segment is linear.