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Methods of graphene growth and related structures

  • US 10,290,808 B2
  • Filed: 03/19/2018
  • Issued: 05/14/2019
  • Est. Priority Date: 05/31/2016
  • Status: Active Grant
First Claim
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1. A method, comprising:

  • providing a substrate including a nanorod extending therefrom, wherein the nanorod includes an insulating outer surface that traverses a circumference of the nanorod;

    forming, by a vapor phase deposition process, a carbon-containing layer over the insulating outer surface;

    depositing a metal layer over the carbon-containing layer; and

    after depositing the metal layer, performing an annealing process, wherein the annealing process serves to convert the carbon-containing layer into a carbon nanotube (CNT).

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