Inductor with metal-insulator-metal (MIM) capacitor

• US 10,292,269 B1
• Filed: 04/11/2018
• Issued: 05/14/2019
• Est. Priority Date: 04/11/2018
• Status: Active Grant

• Current Assignee: Qualcomm, Inc.
• Original Assignee: Qualcomm, Inc.
• Inventors: Mudakatte, Niranjan Sunil, Yun, Changhan Hobie, Kim, Jonghae, Yu, Xiaoju, Park, Nosun, Velez, Mario Francisco
• Primary Examiner(s): Nguyen, Hoa C
• Application Number:
  US15/950,865
• Time in Patent Office: 398 Days
• CPC Class Codes: H01L 23/5223 Capacitor integral with wiring layers
• CPC Class Codes: H01L 23/5227 Inductive arrangements or effects of, or between, wiring layers other inductive arrangements H01L23/645
• CPC Class Codes: H01L 23/66 High-frequency adaptations
• CPC Class Codes: H01L 28/10 Inductors
• CPC Class Codes: H01L 28/40 Capacitors
• CPC Class Codes: H03H 2001/0078 comprising spiral inductor on a substrate
• CPC Class Codes: H03H 2001/0085 Multilayer, e.g. LTCC, HTCC, green sheets inside PCB filters H05K
• CPC Class Codes: H03H 7/0115 comprising only inductors and capacitors H03H7/075, H03H7/09, H03H7/12, H03H7/13 take precedence
• CPC Class Codes: H03H 7/1741 Comprising typical LC combinations, irrespective of presence and location of additional resistors when resistors are present, also classify in H03H7/06 - H03H7/07
• CPC Class Codes: H05K 1/16 incorporating printed electric components, e.g. printed resistor, capacitor, inductor

Abstract

An inductor-capacitor (LC) filter includes an inductor having an asymmetric shape including at least one turn. The LC filter also includes serial capacitors coupled to the inductor at only one end of a continuous portion of the inductor. The serial capacitors continues the shape of the inductor. The capacitors are outside of a footprint of the continuous portion of the inductor.

Claims

1. An inductor-capacitor (LC) filter, comprising:

an inductor having an asymmetric shape including at least one turn; and

a plurality of serial capacitors coupled to the inductor to join a continuous portion of the inductor to inductor segments along the at least one turn and continuing the shape of the inductor, the plurality of capacitors residing outside of a footprint of the continuous portion of the inductor and the inductor segments.

2. The inductor-capacitor (LC) filter of claim 1, in which the plurality of serial capacitors includes a MIM capacitor.

3. The inductor-capacitor (LC) filter of claim 2, in which the MIM capacitor is a sidewall MIM capacitor.

4. The inductor-capacitor (LC) filter of claim 2, in which the MIM capacitor comprises a shared plate.

5. The inductor-capacitor (LC) filter of claim 1, in which the plurality of serial capacitors is on a different conductive layer than the inductor.

6. The inductor-capacitor (LC) filter of claim 1, in which the plurality of serial capacitors are on a same conductive layer as the inductor.

7. The inductor-capacitor (LC) filter of claim 1, in which the inductor comprises a continuous 2D portion and a plurality of discontinuous 3D portions.

8. The inductor-capacitor (LC) filter of claim 1, further comprising a passive substrate on which the inductor and plurality of serial capacitors reside.

9. The inductor-capacitor (LC) filter of claim 1, integrated into a radio frequency (RF) front-end module, the RF front-end module incorporated into at least one of a music player, a video player, an entertainment unit, a navigation device, a communications device, a personal digital assistant (PDA), a fixed location data unit, a mobile phone, and a portable computer.

10. A method of fabricating a single-ended radio frequency integrated circuit (RFIC), comprising:

fabricating an inductor having an asymmetric shape including at least one turn; and

coupling a plurality of serial capacitors to the inductor to join a continuous portion of the inductor to inductor segments along the at least one turn and continuing the shape of the inductor, the plurality of serial capacitors residing outside of a footprint of the continuous portion of the inductor and the inductor segments.

11. The method of claim 10, further comprising fabricating the plurality of serial capacitors on a different conductive layer than the inductor.

12. The method of claim 10, further comprising fabricating the plurality of serial capacitors on a same conductive layer as the inductor.

13. The method of claim 10, further comprising fabricating the inductor with a continuous 2D portion and a plurality of discontinuous 3D portions.

14. The method of claim 10, further comprising fabricating the inductor and the plurality of serial capacitors on a passive substrate.

15. The method of claim 10, further comprising integrating the RFIC into a radio frequency (RF) front-end module, the RF front-end module incorporated into at least one of a music player, a video player, an entertainment unit, a navigation device, a communications device, a personal digital assistant (PDA), a fixed location data unit, a mobile phone, and a portable computer.

16. An inductor-capacitor (LC) filter, comprising:

an inductor having an asymmetric shape including at least one turn; and

means for storing charge coupled to the inductor to join a continuous portion of the inductor to inductor segments along the at least one turn and continuing the shape of the inductor, the charge storing means residing outside of a footprint of the continuous portion of the inductor and the inductor segments.

17. The inductor-capacitor (LC) filter of claim 16, in which the charge storing means is on a different conductive layer than the inductor.

18. The inductor-capacitor (LC) filter of claim 16, in which the charge storing means is on a same conductive layer as the inductor.

19. The inductor-capacitor (LC) filter of claim 16, in which the inductor comprises a continuous 2D portion and a plurality of discontinuous 3D portions.

20. The inductor-capacitor (LC) filter of claim 16, integrated into a radio frequency (RF) front-end module, the RF front-end module incorporated into at least one of a music player, a video player, an entertainment unit, a navigation device, a communications device, a personal digital assistant (PDA), a fixed location data unit, a mobile phone, and a portable computer.