Organoaminosilanes and methods for making same
First Claim
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1. A method for preparing a compound selected from the group consisting of an organoaminosilane, an organoaminodisilane, and an organoaminocarbosilane, in the presence of a catalyst comprising at least one member selected from the group consisting of transition metals, lanthanides and actinides, the method comprising the steps of:
- reacting at least one imine having a formula R—
N═
CR′
R″
wherein R, R′ and
R″
are each independently selected from the group consisting of hydrogen, a C1-10 linear alkyl group, a C3-10 branched alkyl, a C3-10 cyclic alkyl group, a C2-10 alkenyl group, a C4-10 aromatic group, a C4-10 heterocyclic group, a C3-10 linear organoamino group, a C2-10 branched organoamino group, a silyl group, a C1-10 linear carbosilyl group, and a C2-10 branched carbosilyl group, wherein at least one of R′ and
R″
or R and R′
, or none of R′ and
R″
or R and R′
are be linked to form a substituted or unsubstituted cyclic ring and a silicon source comprising at least one hydridosilane wherein the hydridosilane has a formula R1R2R3SiH wherein R1 is selected from the group consisting of hydrogen, a C1-10 linear alkyl group, a C3-10 branched alkyl group, a C4-10 cyclic alkyl group, a C2-10 alkenyl group, a C4-10 aromatic group, a C4-10 heterocyclic group, a C1-10 linear organoamino group, a C2-10 branched organoamino group, a silyl group, a C1-10 linear carbosilyl group, and a C2-10 branched carbosilyl group; and
R2 and R3 are each hydrogen.
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Abstract
Organoaminosilanes, such as without limitation di-iso-propylaminosilane (DIPAS), are precursors for the deposition of silicon containing films such as silicon-oxide and silicon-nitride films. Described herein are methods to make organoaminosilane compounds, or other compounds such as organoaminodisilanes and organoaminocarbosilanes, via the catalytic hydrosilylation of an imine by a silicon source comprising a hydridosilane.
10 Citations
7 Claims
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1. A method for preparing a compound selected from the group consisting of an organoaminosilane, an organoaminodisilane, and an organoaminocarbosilane, in the presence of a catalyst comprising at least one member selected from the group consisting of transition metals, lanthanides and actinides, the method comprising the steps of:
reacting at least one imine having a formula R—
N═
CR′
R″
wherein R, R′ and
R″
are each independently selected from the group consisting of hydrogen, a C1-10 linear alkyl group, a C3-10 branched alkyl, a C3-10 cyclic alkyl group, a C2-10 alkenyl group, a C4-10 aromatic group, a C4-10 heterocyclic group, a C3-10 linear organoamino group, a C2-10 branched organoamino group, a silyl group, a C1-10 linear carbosilyl group, and a C2-10 branched carbosilyl group, wherein at least one of R′ and
R″
or R and R′
, or none of R′ and
R″
or R and R′
are be linked to form a substituted or unsubstituted cyclic ring and a silicon source comprising at least one hydridosilane wherein the hydridosilane has a formula R1R2R3SiH wherein R1 is selected from the group consisting of hydrogen, a C1-10 linear alkyl group, a C3-10 branched alkyl group, a C4-10 cyclic alkyl group, a C2-10 alkenyl group, a C4-10 aromatic group, a C4-10 heterocyclic group, a C1-10 linear organoamino group, a C2-10 branched organoamino group, a silyl group, a C1-10 linear carbosilyl group, and a C2-10 branched carbosilyl group; and
R2 and R3 are each hydrogen.- View Dependent Claims (2, 3, 4, 5, 6, 7)
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Current AssigneeVersum Materials US Inc.
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Original AssigneeVersum Materials US Inc.
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InventorsXiao, Manchao, MacDonald, Matthew R., Ho, Richard, Lei, Xinjian
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Primary Examiner(s)Brooks, Clinton A
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Assistant Examiner(s)Adzamli, Kofi
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Application NumberUS15/474,789Publication NumberTime in Patent Office782 DaysField of Search556410US Class CurrentCPC Class CodesC07F 7/025 without C-silicon linkagesC07F 7/10 containing nitrogen having ...
