Flexible conductive diaphragm, flexible vibration sensor and preparation method and application thereof

• US 10,295,401 B2
• Filed: 08/13/2015
• Issued: 05/21/2019
• Est. Priority Date: 03/17/2015
• Status: Active Grant

• Current Assignee: Suzhou Institute of Nano-Tech and Nano-Bionics
• Original Assignee: Suzhou Institute of Nano-Tech and Nano-Bionics
• Inventors: Zhang, Ting, Gu, Yang
• Primary Examiner(s): Noori, Max H
• Application Number:
  US15/559,069
• Publication Number:
  US 20180073917A1
• Time in Patent Office: 1,377 Days
• Field of Search: 73862391, 73962391
• CPC Class Codes: G01H 11/06 by electric means
• CPC Class Codes: G01P 5/08 by measuring variation of an electric variable directly affected by the flow, e.g. by using dynamo-electric effect
• CPC Class Codes: G01P 5/24 by measuring the direct influence of the streaming fluid on the properties of a detecting acoustical wave
• CPC Class Codes: H04R 2307/023 Diaphragms comprising ceramic-like materials, e.g. pure ceramic, glass, boride, nitride, carbide, mica and carbon materials
• CPC Class Codes: H04R 2307/025 Diaphragms comprising polymeric materials
• CPC Class Codes: H04R 7/12 Non-planar diaphragms or cones
• CPC Class Codes: H04R 7/14 corrugated, pleated or ribbed

Abstract

A flexible conductive diaphragm comprises at least one conductive film, and the conductive film comprises a flexible support layer (1), a flexible sensitive layer (2) overlapped on the flexible support layer (1), a flexible conductive layer (3) overlapped on the flexible sensitive layer (2), and an electrode (4) electrically connected with the flexible conductive layer (3). A method for preparing the flexible conductive diaphragm and a flexible vibration sensor based on the flexible conductive diaphragm are provided. With the combination of the techniques such as the flexible material, the nano-material and the arrayed micro-structure, the flexible vibration sensor has the characteristics of high sensitivity, low preparation cost, light weight, small thickness, small size, and being foldable and flexible, and can be applied in wearable or adherable electronic devices.

Claims

1. A flexible conductive diaphragm, characterized in that:

it comprises two or more conductive films which are overlapped, wherein each conductive film comprises a flexible support layer, a flexible sensitive layer overlapped on the flexible support layer, a flexible conductive layer overlapped on the flexible sensitive layer, and an electrode electrically connected with the flexible conductive layer, an arrayed micro-structure is provided on a surface of the flexible sensitive layer, and the micro-structure includes a non-planar micro-structure, wherein the flexible conductive layers of adjacent conductive films are contacted with each other to form a contact resistance layer with a resistance being adjustable.

2. The flexible conductive diaphragm according to claim 1, characterized in that:

it comprises a plurality of conductive films which are overlapped, and more than two contact resistance layers are formed between the plurality of conductive films.

3. The flexible conductive diaphragm according to claim 1, characterized in that:

the flexible sensitive layer is adhered and fixed to the flexible support layer;

or, the flexible sensitive layer and the flexible support layer are combined with each other.

4. The flexible conductive diaphragm according to claim 1, characterized in that:

the flexible sensitive layer has a thickness of 0.1˜

200 μ

m.

5. The flexible conductive diaphragm according to claim 1, characterized in that:

more than one flexible layer is further arranged between the flexible support layer and the flexible sensitive layer and/or between the flexible sensitive layer and the flexible conductive layer.

6. The flexible conductive diaphragm according to claim 1, characterized in that:

the non-planar micro-structure includes pyramid, rectangular pyramid, triangular pyramid, hemisphere, or cylinder micro-structure.

7. The flexible conductive diaphragm according to claim 6, characterized in that:

the flexible conductive layer is conformally adhered on a surface of the flexible sensitive layer.

8. The flexible conductive diaphragm according to claim 7, characterized in that:

wherein a top point of a non-planar micro-structure of one flexible conductive layer is electrically contacted with another matching flexible conductive layer.

9. The flexible conductive diaphragm according to claim 8, characterized in that:

wherein a top point of a non-planar micro-structure of one flexible conductive layer is electrically contacted with a planar area of another matching flexible conductive layer.

10. The flexible conductive diaphragm according to claim 1, characterized in that:

the material of the flexible sensitive layer or the flexible support layer includes high polymer material which is at least selected from polyethylene terephthalate, polydimethylsiloxane, polyimide, polyurethane, polyvinyl alcohol, polyvinyl formal, and polyethylene.

11. A method for preparing the flexible conductive diaphragm according to claim 1, characterized in that it comprises steps of:

at first, preparing two or more conductive films, wherein steps of preparing each of the conductive films comprise;

(1) preparing a template for a flexible sensitive layer and forming a flexible sensitive layer on a surface of the template;

(2) forming a flexible support layer on the flexible sensitive layer;

(3) removing the flexible sensitive layer and the flexible support layer from the template;

(4) forming a flexible conductive layer on the flexible sensitive layer, and electrically connecting an electrode to the flexible conductive layer,

wherein, in the step (1), preparing the template with the surface having a micro-pattern structure, and forming, on a surface of the flexible sensitive layer, an arrayed micro-structure which corresponds with the micro-pattern structure and includes a non-planar micro-structure,

then, overlapping the conductive films in such a manner that the flexible conductive layers of adjacent conductive films are contacted with each other to form a contact resistance layer with a resistance being adjustable.

12. The method for preparing the flexible conductive diaphragm according to claim 11, characterized in that the step (2) comprises:

performing surface treatment for the flexible support layer or the flexible sensitive layer, then combining the flexible support layer and the flexible sensitive layer, wherein the surface treatment is performed in a manner including strong acid oxidation, plasma treatment, or ultraviolet and ozone treatment.

13. A flexible vibration sensor, characterized in that:

it comprises the flexible conductive diaphragm according to claim 1.

14. The method for preparing the flexible conductive diaphragm according to claim 11, characterized in that the step (2) comprises:

adhering the flexible support layer with the flexible sensitive layer to achieve a combination thereof, or combining solidified or partially solidified flexible support layer with solidified or partially solidified flexible sensitive layer through a cross-linking reaction.