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Flexible conductive diaphragm, flexible vibration sensor and preparation method and application thereof

  • US 10,295,401 B2
  • Filed: 08/13/2015
  • Issued: 05/21/2019
  • Est. Priority Date: 03/17/2015
  • Status: Active Grant
First Claim
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1. A flexible conductive diaphragm, characterized in that:

  • it comprises two or more conductive films which are overlapped, wherein each conductive film comprises a flexible support layer, a flexible sensitive layer overlapped on the flexible support layer, a flexible conductive layer overlapped on the flexible sensitive layer, and an electrode electrically connected with the flexible conductive layer, an arrayed micro-structure is provided on a surface of the flexible sensitive layer, and the micro-structure includes a non-planar micro-structure, wherein the flexible conductive layers of adjacent conductive films are contacted with each other to form a contact resistance layer with a resistance being adjustable.

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