Offset rejection electrodes

• US 10,295,558 B2
• Filed: 05/31/2017
• Issued: 05/21/2019
• Est. Priority Date: 05/15/2015
• Status: Active Grant

• Current Assignee: Invensense Incorporated (TDK Corporation)
• Original Assignee: Invensense Incorporated (TDK Corporation)
• Inventors: Thompson, Matthew Julian, Molfese, Antonio
• Primary Examiner(s): Bolduc, David J
• Application Number:
  US15/609,757
• Publication Number:
  US 20170260039A1
• Time in Patent Office: 720 Days
• CPC Class Codes: B81B 7/008 MEMS characterised by an electronic circuit specially adapted for controlling or driving the same B81B7/0087 takes precedence; arrangements for starting, regulating, braking, or otherwise controlling an actuator H02N; control arrangements or circuits for visual indicators G09G3/00
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0831 the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration

Abstract

A MEMS sensor includes a sensing reference plane, an anchor, a proof mass, and sensing elements. The anchor is coupled to the sensing reference plane and to the proof mass that moves under an external excitation. The sensing elements detect motion normal to the sensing reference plane. A summation of a product of polarity for each sensing element, its area, and its distance to the anchor on one side of an axis line is unequal to a summation of a product of a polarity associated with each sensing element, its associated area, and its distance to the anchor on another side of the axis line. As such, external excitation creates an offset. The offset is substantially constant for curvature angles (0°-360°) of the sensing reference plane. The offset is greater than zero and is less than a maximum offset for a MEMS sensor with perfect symmetry for its sensing elements.

Claims

1. A Microelectromechanical System (MEMS) sensor comprising:

a first plurality of sensing elements positioned on a surface forming a sensing reference plane;

an anchor coupled to the surface;

a proof mass coupled to the anchor, wherein the proof mass moves under an external excitation;

wherein the first plurality of sensing elements is configured to detect motion normal to the sensing reference plane, wherein the first plurality of sensing elements comprises positive and negative electrodes, and wherein an axis line formed between the first plurality of sensing elements is a straight line that goes through a center of the anchor, and wherein the axis line forms a first sensing elements section and a second sensing elements section from the first plurality of sensing elements, wherein a symmetrical correlation between the first sensing elements section and the second sensing elements section is nonzero, and wherein the symmetrical correlation is based on a polarity of sensing elements within each section, and wherein the symmetrical correlation is further based on an area of each sensing element within each section, and wherein the symmetrical correlation is further based on a distance of each sensing element within each section to the axis line; and

a signal processing circuit configured to combine electrical charges generated by the first plurality of sensing elements to provide an output that is proportional to the external excitation.

2. The MEMS sensor of claim 1, wherein the symmetrical correlation associated with the first sensing elements section is within 5% of the second sensing elements section.

3. The MEMS sensor of claim 1, wherein a sensing element of the first plurality of sensing elements is a sensor selected from a group consisting of variable capacitor, a piezo-resistors, piezo-electric, magnetic, and optical sensor.

4. The MEMS sensor of claim 1, wherein an area of the first sensing elements section is different from an area of the second sensing elements section.

5. The MEMS sensor of claim 1, wherein at least two sensing elements of the first plurality of sensing elements are positioned at a different distance to the axis line.

6. The MEMS sensor of claim 1, wherein each sensing element is any of circular, rectangular, square, hexagonal, octagonal, annular sector, and polygonal in shape.

7. The MEMS sensor of claim 1, wherein the symmetrical correlation is a summation of a product of a polarity associated with each sensing element and its associated area and the distance to the anchor within each sensing elements section.

8. The MEMS sensor of claim 1 further comprising:

a second plurality of sensing elements formed on an outer periphery of the first plurality of sensing elements.

9. The MEMS sensor of claim 1, wherein the first sensing elements section is asymmetric with respect to the second sensing elements section.

10. The MEMS sensor of claim 1, wherein the symmetrical correlation is further based on a gap between the proof mass and the sensing reference plane.

11. A Microelectromechanical System (MEMS) sensor comprising:

a sensing element positioned on a surface forming a sensing reference plane;

an anchor coupled to the surface;

a proof mass coupled to the anchor, wherein the proof mass moves under an external excitation;

wherein the sensing element comprises a first plurality of sensing elements coupled between the sensing reference plane and the proof mass to detect motion normal to the sensing reference plane and a second plurality of sensing elements coupled between the sensing reference plane and the proof mass to detect motion normal to the sensing reference plane,

wherein the first plurality of sensing elements has partial symmetry with the second plurality of sensing elements based on polarities of sensing elements, areas of sensing elements, and distance of sensing elements to the anchor generates an offset that is substantially constant for curvature angles of the sensing reference plane that ranges between 0°

to 360°

degrees, wherein the offset that is substantially constant is greater than zero and is less than a maximum offset for a MEMS sensor with curvature angles of the sensing reference planes that ranges between 0°

to 360°

degrees with sensing elements that form a perfect symmetry based on polarities of its corresponding sensing elements, areas of its corresponding sensing elements, and distance of its corresponding sensing elements to the anchor; and

a signal processing circuit configured to combine electrical charges generated by the first plurality of sensing elements and the second plurality of sensing elements to provide an output that is proportional to the external excitation.

12. The MEMS sensor of claim 11, wherein the partial symmetry between the first plurality of sensing elements and the second plurality of sensing elements is within 5% of one another.

13. The MEMS sensor of claim 11, wherein a sensing element of the first plurality of sensing elements is a sensor selected from a group consisting of variable capacitor, a piezo-resistors, piezo-electric, magnetic, and optical sensor, and wherein a sensing element of the second plurality of sensing elements is a sensor selected from a group consisting of variable capacitor, a piezo-resistors, piezo-electric, magnetic, and optical sensor.

14. The MEMS sensor of claim 11, wherein a sensing element of the first plurality of sensing elements is positioned at a different distance to the anchor than a sensing element of the second plurality of sensing elements.

15. The MEMS sensor of claim 11, wherein each sensing element is any of circular, rectangular, square, hexagonal, octagonal, annular sector, and polygonal in shape.

16. The MEMS sensor of claim 11, wherein the offset is a summation of a product of a polarity associated with each sensing element and its associated area and the distance to the anchor.

17. The MEMS sensor of claim 11, wherein the partial symmetry is further based on a gap between the proof mass and the sensing reference plane.

18. The MEMS sensor of claim 11, wherein an area of a sensing element of the first plurality of sensing elements is different from an area of a sensing element of the second plurality of sensing elements.

19. A Microelectromechanical System (MEMS) sensor comprising:

a first plurality of sensing elements positioned on a surface forming a sensing reference plane;

an anchor coupled to the surface;

a proof mass coupled to the anchor, wherein the proof mass moves under an external excitation;

wherein the first plurality of sensing elements is configured to detect motion normal to the sensing reference plane;

a signal processing circuit configured to combine electrical charges generated by the plurality of sensing elements to provide an output in response to the external excitation,

wherein an axis line formed between the plurality of sensing elements is a straight line that goes through a center of the anchor, and wherein the axis line forms a first sensing elements section and a second sensing elements section from the plurality of sensing elements

wherein placement, size, and shape associated with each sensing element of the first sensing elements section and the second sensing elements section forms a partial symmetry,

wherein the partial symmetry between the first sensing elements section and the second sensing elements section is defined as a difference between a first function and a second function,

wherein the first function results in a zero summation and wherein the second function results in a non-zero summation,

wherein the first function is based on a product of polarity, area, and a first polynomial of a distance of each sensing element of the first sensing elements section to the axis line,

wherein the second function is based on a product of polarity, area, and a second polynomial of a distance of each sensing element of the second sensing elements section to the axis line.

20. The MEMS sensor of claim 19, wherein an area of the first sensing elements section is different from an area of the second sensing elements section.

21. The MEMS sensor of claim 19, wherein at least two sensing elements of the first plurality of sensing elements are positioned at a different distance to the axis line.