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Narrow pre-deposition laser deletion

  • US 10,295,880 B2
  • Filed: 12/23/2016
  • Issued: 05/21/2019
  • Est. Priority Date: 12/12/2011
  • Status: Active Grant
First Claim
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1. A method of fabricating an optical device comprising one or more material layers sandwiched between a first and a second conductor layer, the method comprising:

  • receiving a substrate with the first conductor layer over its work surface;

    (ii) removing a first width of the first conductor layer in a region along between about 50% and about 90% of the perimeter of the substrate while leaving a pad of the first conductor layer coextensive with the first width along the perimeter;

    (iii) depositing said one or more material layers of the optical device and the second conductor layer over the work surface of the substrate; and

    (iv) removing a second width of all the layers along substantially the entire perimeter of the substrate, wherein the depth of removal is at least sufficient to remove the first conductor layer, and wherein the second width of removal is sufficient to remove the pad and the remaining 10% to 50% of the first conductor layer along the perimeter of the substrate,wherein at least one of the first and second conductor layers is transparent.

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