Flexible electrochemical micro-sensor

• US 10,299,711 B2
• Filed: 01/17/2018
• Issued: 05/28/2019
• Est. Priority Date: 03/07/2014
• Status: Active Grant

• Current Assignee: STMicroelectronics International N.V. (STMicroelectronics NV)
• Original Assignee: Stmicroelectronics Pte Limited (STMicroelectronics NV)
• Inventors: Le Neel, Olivier, Cherian, Suman, Leung, Calvin
• Primary Examiner(s): Ball, J. Christopher
• Application Number:
  US15/873,557
• Publication Number:
  US 20180140234A1
• Time in Patent Office: 496 Days
• CPC Class Codes: A61B 5/14532 for measuring glucose, e.g. by tissue impedance measurement
• CPC Class Codes: A61B 5/1468 using chemical or electrochemical methods, e.g. by polarographic means A61B5/1486 takes precedence
• CPC Class Codes: A61B 5/1473 invasive, e.g. introduced into the body by a catheter A61B5/1482 takes precedence
• CPC Class Codes: G01N 27/3272 Test elements therefor, i.e. disposable laminated substrates with electrodes, reagent and channels optical biosensors G01N33/52

Abstract

A universal electrochemical micro-sensor can be used either as a biosensor or an environmental sensor. Because of its small size and flexibility, the micro-sensor is suitable for continuous use to monitor fluids within a live subject, or as an environmental monitor. The micro-sensor can be formed on a reusable glass carrier substrate. A flexible polymer backing, together with a set of electrodes, forms a reservoir that contains an electrolytic fluid chemical reagent. During fabrication, the glass carrier substrate protects the fluid chemical reagent from degradation. A conductive micromesh further contains the reagent while allowing partial exposure to the ambient biological or atmospheric environment. The micromesh density can be altered to accommodate fluid reagents having different viscosities. Flexibility is achieved by attaching a thick polymer tape and peeling away the micro-sensor from the glass carrier substrate. The final structure is thereby transferred to the polymer tape, providing a flexible product.

Claims

1. A device, comprising:

a flexible substrate;

a first polymer layer on the flexible substrate;

a second polymer layer on the first polymer layer, the second polymer layer having a first surface opposite the first polymer layer;

a well extending through the first polymer layer and the second polymer layer, the well having an opening at the first surface of the second polymer layer;

a plurality of contacts on the first polymer layer;

a plurality of electrodes in the well, the plurality of electrodes extending at least partially over the opening in the well; and

a plurality of traces between the first polymer layer and the second polymer layer, each of the traces extending between a respective contact and a respective electrode.

2. The device of claim 1 wherein at least a first trace of the plurality of traces extends between a first contact and a first electrode in a straight line along a first direction.

3. The device of claim 2 wherein at least a second trace of the plurality of traces extends between a second contact and a second electrode in a line having a first portion extending in the first direction and a second portion extending in a second direction that is transverse to the first direction.

4. The device of claim 1, further comprising a fluid chemical reagent contained in the well.

5. The device of claim 1, further comprising a species inlet net partially covering the opening of the well.

6. The device of claim 1 wherein at least one of the plurality of electrodes extends along a sidewall of the well.

7. A micro-sensor, comprising:

a flexible substrate;

a first polymer layer on the flexible substrate;

a second polymer layer on the first polymer layer;

a well that extends through the first and second polymer layers, the first and second polymer layers together form sides of the well, the well having a well opening at a surface of the second polymer layer; and

metal electrodes on the surface of the second polymer layer, the metal electrodes extend over at least a portion of the well opening.

8. The micro-sensor of claim 7, further comprising:

electrical contacts spaced apart from the well; and

metal traces that electrically couple the electrical contacts to the metal electrodes.

9. The micro-sensor of claim 8 wherein the micro-sensor includes three metal electrodes, three electrical contacts, and three metal traces that electrically couple respective ones of the metal electrodes to respective ones of the electrical contacts, each of the metal electrodes extend over respective portions of the well opening.

10. The micro-sensor of claim 9 wherein the well opening is circular.

11. The micro-sensor of claim 9 wherein the metal traces are disposed between the first polymer layer and the second polymer layer.

12. The micro-sensor of claim 7, further comprising a volume of a fluid chemical reagent contained in the well.

13. The micro-sensor of claim 7 wherein the flexible substrate is a polymer tape.

14. A device, comprising:

a substrate;

a first polymer layer on the substrate;

a second polymer layer on the first polymer layer, the second polymer layer having a first surface;

a well that extends through the first and second polymer layers, the well including a first well opening at the first surface of the second polymer layer and a second well opening at the first surface of the second polymer layer;

an electrical contact spaced apart from the well;

a conductive trace that extends between the electrical contact and the well; and

a species inlet net that at least partially covers the first well opening and the second well opening, wherein the species inlet net is capacitively or inductively coupled to the conductive trace.

15. The device of claim 14 wherein the conductive trace includes a portion between the first and second well openings.

16. The device of claim 14, further comprising a fluid chemical reagent in the well, wherein the species inlet net contacts the fluid chemical reagent.

17. The device of claim 14 further comprising a plurality of electrodes proximate the well.

18. The device of claim 14 wherein the first well opening is spaced from the second well opening along the first surface of the second polymer layer.

19. A method, comprising:

forming a first polymer layer on a first substrate;

forming openings in the first polymer layer, the openings including a well opening;

forming metal electrodes that extend over at least a portion of the well opening;

forming conductive traces on the first polymer layer, the traces being electrically coupled to the metal electrodes; and

forming a second polymer layer on the first polymer layer, the first and second polymer layers together forming sides of a well.

20. The method of claim 19, further comprising:

dispensing a volume of a fluid chemical reagent into the well;

attaching a second substrate to the second polymer layer; and

separating the first substrate from the first polymer layer.

21. The method of claim 20 wherein attaching the second substrate to the second polymer layer includes laminating a polymer tape onto the second polymer layer.

22. The method of claim 19 wherein the first substrate is a glass carrier substrate.

23. The method of claim 19 wherein the openings include contact holes, the method further comprising forming electrical contacts in the contact holes.

24. The method of claim 19 wherein the well opening is substantially circular.

25. The method of claim 19 wherein forming the metal electrodes includes forming one or more arc segments adjacent to a perimeter of the well opening.

26. The method of claim 19 wherein forming the metal electrodes includes forming a metal micromesh over the well opening.