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Arbitarary waveform generation using nanosecond pulses

  • US 10,304,661 B2
  • Filed: 08/27/2018
  • Issued: 05/28/2019
  • Est. Priority Date: 08/25/2017
  • Status: Active Grant
First Claim
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1. A high voltage waveform generator comprising:

  • a generator inductor;

    a high voltage nanosecond pulser electrically and/or inductively coupled with the generator inductor, the high voltage nanosecond pulser configured to charge the generator inductor with;

    a first pulse burst comprising a first plurality of high voltage pulses, each pulse of the first plurality of pulses having a pulse width, the first pulse burst having a first burst period; and

    a second pulse burst comprising a second plurality of high voltage pulses, each pulse of the second plurality of pulses having a pulse width, the second pulse burst having a second burst period; and

    a plasma coupled with the nanosecond pulser and the generator inductor, the voltage across the plasma varying according to;

    a first plasma pulse having a first output pulse width and a first output voltage, the first output pulse width being substantially equal to the first burst period and the first output voltage being substantially proportional to a pulse width of each of the pulses of the first plurality of pulses, anda second plasma pulse having a second output pulse width and a second output voltage, the second output pulse width being substantially equal to the second burst period and the second output voltage being substantially proportional to a pulse width of each of the pulses of the second plurality of pulses.

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